Wafergard® III NF-30 In-line Gas Filters

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Offer superior particulate filtration for ultrapure gas system filtration.

All metal construction provides the cleanest, most efficient all-metal filters available
Patented nickel filter membrane offers superior corrosion resistance and excellent chemical compatibility
Innovative housing design helps eliminate outgassing and reduces drydown time
Ideal for high-temperature and dynamic-pressure applications
Typically used for flows up to 30 slpm

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Applications Wafergard® III NF-30 In-line Gas Filters Applications

Bulk gas delivery
Photolithography
Deposition
Dry etch
Ion implantation

Note: Not recommended for use with CO, O₃, and low level hydride dopant gases.

Specifications

Drawings

Performance Data

Product Specifications

Materials	Filter membrane	Patented, sintered nickel
	Housing	Electropolished F20 stainless steel
Downstream cleanliness	Particles^*	<0.03 particles/Liter (<1 particle/ft³) >0.01 µm
	Volatiles^**	Volatile outgassing of H₂O, O₂, and THC is below detectable limits (by RGA and FID at room temperature)
Removal rating	≥0.0015 µm
Surface finish interior	≤5 µin Ra
Helium leak rate	Qualified	2x10^-10 atm cc/sec
	Tested	1x10^-9 atm cc/sec
Maximum operating conditions	Maximum inlet pressure:	70 bar (1000 psi) @ 100°C (212°F)
Maximum operating conditions	Maximum forward/reverse differential pressure:	10 bar (150 psid)
Maximum operating temperature	Inert gases	400°C (752°F) at 35 bar (500 psi)
Maximum operating temperature	Corrosive and reactive gases	50°C (122°F) at 70 bar (1000 psi)
Warranty	5 year
Particle retention	Greater than 99.9999999% (9 LRV) removal of all particles at 30 slpm
	Greater than 99.9999% removal of all particles at 75 slpm (referenced at the most penetrating particle size)
Flow rate	Refer to flow curve

^*Particle cleanliness qualified following SEMASPEC Test Method for Particle Shedding (#93021511A-STD)
**Volatile cleanliness qualified following SEMASPEC Test Methods for: THC Contribution (#90120396B-STD), Moisture Contribution (#90120397B-STD), Oxygen Contribution (#90120398B-STD)

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Reference Materials Product Documentation

Published May 5, 2023 Data Sheet Wafergard® III NF-30 In-line Gas Filters

451.5 kB

Published May 5, 2023 Data Sheet Wafergard® III NF-30 In-line Gas Filters - A4

451.5 kB

Published Nov 2, 2020 Manual and Guide Wafergard® Gas Filter Compatibility Guide

102.3 kB

Part Numbers

Wafergard® III NF-30 In-line Gas Filters Part Numbers

Part Number	Fitting Size and Type	Length
WG3NS3FF2	1/4" Gasket seal (compatible with VCR fitting) female inlet/outlet	58.4 mm (2.30")
WG3NS3JJ2	1/4" Butt weld tube	28.4 mm (1.12")
WG3NS3RF2	1/4" Polarized gasket seal (compatible with VCR fitting) male inlet/female outlet	71.1 mm (2.80")
WG3NS6RR2	1/4" Gasket seal (compatible with VCR fitting) male inlet/outlet	84.1 mm (3.31")
WG3NS6SL2	1/4" Gasket seal (compatible with VCR Fitting) male inlet/outlet, short Version	58.7 mm (2.31")