Wafergard® GTL In-line Gas Filters
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- Low air intake filter
- Wafer transport systems
- Clean dry air (CDA)
Specifications
Materials | Membrane: | Hydrophobic fluoropolymer PTFE |
Supports, housings: | Polysulfone | |
Recommended flow rate | 80 slpm | |
Connections | Rc1⁄4 (PT1⁄4 female), 1⁄4” NPT female | |
Membrane area | 25 cm2 (3.9 in2) | |
Particle retention | >99.9999999% removal of all particles greater than 0.0015 μm diameter (verified at the most penetrating particle size) | |
Operating conditions | Maximum operating pressure: | 0.41 MPa (4.1 bar, 56.6 psid) at 20°C |
Maximum forward differential pressure: | 0.41 MPa (4.1 bar, 56.6 psid) at 20°C | |
Maximum reverse differential pressure: | 0.03 MPa (0.3 bar, 4.35 psid) at 20°C | |
Maximum operating temperature: | 50°C (122°F) | |
Dimensions | Diameter: | 25 mm (0.98”) |
Length: | 101 mm (4.0”) |
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