Chacollet™ In-line Hydrocarbon Purifiers
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- Ideal for purging applications
- Hydrocarbon impurity removal in purge gasses
- Photolithography applications
Specifications
Materials: | Adsorbent | Ultrapure Activated Carbon |
Housing | Electropolished 316L stainless steel | |
Downstream cleanliness: | Volatiles | <1 ppb (>C6 number of gaseous organic hydrocarbon at 1 SLPM) |
Particles | <0.03 particles/liter >0.01 µm at 30 SLPM | |
Operating conditions: | Maximum inlet pressure | 9.7 bar (0.97 MPa, 141 PSIG) |
Maximum forward/reverse differential pressure | 9.7 bar (0.97 MPa, 141 PSIG) | |
Maximum rated flow | 30 SLPM | |
Maximum operating temperature | 150°C (302°F) – inert gases | |
Retention: | Particle | >99.9999% (6 LVR) removal of all particles @ 30 SLPM (referenced at the most penetrating particle size) |
Hydrocarbon | <1 ppb (>C6 number of gaseous organic hydrocarbon) |
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