GateKeeper® Z3 Series Gas Purification Systems
Contact your Entegris account manager or
- Photolithography
- FOUP Cleaning and purging
- Stocker cleaning and purging
- Other applications requiring XCDA purge gas
Specifications
Model | GPS400Z3 | GPS500Z3 | GPS600Z3 |
Gases purified: | CDA (air) | ||
Media type: | Inorganic | ||
Contaminants removed: | Volatile acids <1 ppt | ||
Volatile bases <10 ppt | |||
Refractory compounds <1 ppt | |||
Condensable organics <1 ppt | |||
Moisture <100 ppt | |||
Operating pressure range: | 5.51-17.23 bar (80-250 psig) | ||
Pressure drop: | <14.5 psi @ 100 psig and max rated flow | ||
Maximum flow rate: | 400 Nm3/hr (6211 SLM) | 500 Nm3/hr (7764 SLM) | 600 Nm3/hr (9317 SLM) |
Gas operating temperature: | 15°C–40°C (60°F–104°F) | ||
Outlet filtration (ISO Class 1) | <10 particles per m3 @ 0.1 μm | ||
<2 particles per m3 @ 0.2 μm | |||
Leak rating: | 1 × 10-9 atm cc/sec |
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