Wafergard® II F Micro In-line Gas Filters
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- Life sciences applications
- Ozone applications (gas)
- Gas cabinets and panels
- Ultrapure gas systems
- Inside process tools
Specifications
Materials |
Filter element |
Hydrophobic PTFE membrane supported by molded PFA structure |
Housing | Electropolished VAR 316L stainless steel | |
Downstream cleanliness | Less than 0.03 particles/liter (<1 particle/ft3) greater than 0.01 µm | |
Volatiles | <10 ppb moisture | |
Removal rating | ≥0.0015 µm | |
Surface finish interior | ≤7 µin Ra | |
Helium leak rating | Qualified | 2 × 10-10 cc/sec |
Tested | 1 × 10-9 cc/sec | |
Operating conditions | Maximum inlet pressure | 207 bar (3000 psig) @ 23°C (73°F) |
Maximum forward differential pressure | 4 bar (60 psid) @ 23°C (73°F) |
|
Maximum reverse differential pressure | 0.07 MPa (0.7 bar,10 psid) @ 23°C (73°F) |
|
Maximum operating temperature | 120°C (248°F) | |
Particle retention |
Greater than 99.9999999% (9 LRV) removal of all particles @ 30 slpm (referenced at the most penetrating particle size) | |
Flow rating | Refer to performance data |
Successfully Opted for software Updates
Part Number | Fitting Size and Type | Length | Application |
---|---|---|---|
WG2FT1BW2 | 1/4" Butt weld tube | 89.9 mm (3.54") | Semiconductor |
WG2FT1RF2 | 1/4" gasket seal (compatible with VCR fitting) male inlet/ female outlet | 88.9 mm (3.50") | Semiconductor |
WG2FT1RR2 | 1/4" Gasket seal (compatible with VCR Fitting) male inlet/outlet | 84.1 mm (3.31") | Semiconductor |
WG2FT1RR2L | 1/4" Gasket seal (compatible with VCR Fitting) male inlet/outlet | 84.1 mm (3.31") | Life Sciences |
WG2FT1SS2 | 1/4" Compression seal (compatible with Swagelok fitting) | 73.7 mm (2.90") | Semiconductor |