In-Line PTFE Gas Filters


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  • Fitting Size
  • Fitting Type
  • Length
  • Max Operating Pressure
  • Max Temperature
  • Maximum Flow Rate
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  • Process
Provides superior particulate filtration in high-temperature applications (up to 200°C)
Fitting Size
  • 1/2"
Fitting Type
  • Gasket seal
Length
  • 148.0 mm (5.82")
  • 127.0 mm (5.00")
Industry
  • Semiconductor
  • Flat Panel Display
  • Data Storage
  • LED
These in-line PTFE gas filters are compatible with high-purity gases and provide superior particulate filtration in ultrapure gas applications as well as general nitrogen and CDA applications
Fitting Size
  • 1/4"
  • 3/8"
  • 1/2"
Fitting Type
  • Male VCR®
  • Swagelok®
  • Butt weld tube
Length
  • 112.7 mm (4.44")
  • 117.9 mm (4.64")
  • 118.7 mm (4.67")
  • 127.0 mm (5.00")
  • 133.4 mm (5.25")
  • 141.2 mm (5.6")
Industry
  • Semiconductor
  • Flat Panel Display
  • Data Storage
  • LED
Wafergard® MAX-1000 In-line PTFE gas filters offer superior particulate filtration for ultrapure gas applications
Fitting Size
  • 1/2"
Fitting Type
  • Gasket seal (VCR® compatible)
  • male inlet/outlet
  • Compression seal (Swagelok® compatible)
  • male inlet/outlet
Length
  • 127.0 mm (5.00")
  • 118.7 mm (4.67")
Industry
  • Semiconductor
  • Flat Panel Display
  • Data Storage
  • LED
These filters have excellent compatibility with all classes of semiconductor gases and offer high-efficiency particulate filtration
Fitting Size
  • 3/8"
  • 1/2"
  • 3/4"
Fitting Type
  • Butt weld tube
  • Gasket seal
Length
  • 398 mm (15.68")
  • 295.0 mm (11.6")
  • 225.0 mm (8.86")
Max Operating Pressure
  • 18 bar (250 psig) @ 23°C (73°F)
Superior particulate filtration for ultrapure gas system filtration. Recommended for inert and reactive gases, the Wafergard® II F Micro In-Line Gas Filters offer excellent compatibility with all classes of semiconductor process gases.
Fitting Size
  • 1/4"
Fitting Type
  • Gasket seal
  • Butt weld tube
Length
  • 84.1 mm (3.31")
  • 73.7 mm (2.90")
Max Operating Pressure
  • 207 bar (3000 psig) @ 23°C (73°)
Superior particulate filtration for ultrapure gas systems. Wafergard® II F Mini XL Gas Filters deliver excellent compatibility with all classes of semiconductor process gases.
Fitting Size
  • 1/4"
  • 1/2"
  • 3/8"
Fitting Type
  • Gasket seal
  • Butt weld tube
  • Compression seal
Length
  • 115.5 mm (4.55")
  • 119.3 mm (4.70")
  • 127 mm (5.00")
  • 133.4 mm (5.25")
Max Operating Pressure
  • 20.7 MPa (207 bar
  • 3000 psig) @ 23°C (73°F)
Wafergard® GTL in-line gas filters are designed to remove particles from inert gases for flow rates up to 60 slpm.
Fitting Size
  • RC 1/4"
  • 1/4"
Fitting Type
  • PT female
  • NPT female
Length
  • 101 mm (4.0")
Max Operating Pressure
  • 0.41 MPa (4.1 bar
  • 56.6 psid) @ 20°C
Wafergard® SG FG Gas filters provide superior particulate filtration to maximize photovoltaic cell and display manufacturing production yields. The PTFE filter elements are compatible with high-purity process gases as well as inert gas and CDA applications.
Fitting Size
  • 1/4"
  • 3/8"
Fitting Type
  • Compression seal
  • Gasket seal
  • NPT
Length
  • 73.7 mm (2.90")
  • 84.1 mm (3.31")
  • 115.5 mm (4.55")
  • 119.3 mm (4.70")
  • 127 mm (5.00")
  • 133.5 mm (5.26")
Max Operating Pressure
  • 20 MPa (200 bar
  • 2900 psid) @ 23°C (73°F)
Wafergard® GT-PLUS in-line gas filters remove particle from inert gases for flow rates up to 30 slpm.
Fitting Size
  • 1/4"
  • 1/8"
Fitting Type
  • Compression seal
Length
  • 69.mm (2.7")
  • 71.5 mm (2.8")
Max Operating Pressure
  • 0.41 MPa (4.1 bar
  • 56.6 psid) @ 20°C
Find Linegard™ GIGAX-FP Filters at Entegris. Industry-leading GIGAX-FP Filters since 1966. Entegris. Creating a material advantage.
Fitting Size
  • 1/2"
  • 3/4"
Fitting Type
  • Gasket seal
  • Compression seal
  • Butt weld
Length
  • 210.8 mm (8.30")
  • 222.7 mm (8.77")
  • 225 mm (8.86")
Industry
  • Semiconductor
  • Flat Panel Display
  • Data Storage
  • LED
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