Gas Purifiers


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  • Gases Purified
Our GPU gas purifiers efficiently remove halogenated gases, hydrides, reactive oxides, saturated and unsaturated hydrocarbons, fluorocarbons and chlorocarbons at a variety of flow rates.
Gases Purified
  • Other gases
  • Xenon (Xe)
  • Helium (He)
  • Argon (AR)
  • Hydrogen (H2)
  • Carbon dioxide (CO2)
  • Oxygen (O2)
  • Ammonia (NH3)
  • Nitrogen (N2)
  • Extreme clean dry air (XCDA®)
GateKeeper® Gas Purification System (GPS) EX Series for continuous high flow, point of use purified H2 (Hydrogen Gas) purge gas at a low cost of ownership
Gases Purified
  • Hydrogen (H2)
GateKeeper® HX Series - Gases Purified: Hydrogen (H2), Nitrogen (N2) or Argon (Ar). Continuous flow, point-of-use purified hydrogen, nitrogen or argon gas at a low cost of ownership.
Gases Purified
  • Argon (Ar)
  • Hydrogen (H2)
  • Oxygen (O2)
The GateKeeper Gas Purification System (GPS) DX series is a state-of the-art continuous service gas purification system from Entegris that brings advanced technology to gas purification. It provides semiconductor manufacturers with an innovative solution for higher wafer yields and lower cost of ownership.
Gases Purified
  • Carbon dioxide (CO2)
Continuous high-flow, point-of-use, purified CO2 gas at a low cost of ownership
Gases Purified
  • Carbon dioxide (CO2)
GateKeeper® Gas Purification System (GPS) SX Series for continuous flow, point-of-use purified NH3 gas at a low cost of ownership
Gases Purified
  • Ammonia (NH3)
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