GateKeeper® Gas Purification System (GPS) SX Series is the latest continuous service gas purification system from Entegris. This advanced gas purification technology provides semiconductor manufacturers with an innovative, efficient and cost effective solution.
Purifies to part-per-billion (ppb) levels
Low pressure resulting in no changes to inlet pressure required
Low cost of ownership
Ambient temperature purification for low energy costs and resource conservation
Power failure will not damage purification system
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