GateKeeper® Z2 Series Gas Purification Systems
Contact your Entegris account manager or
- For use with CDA (air) gas
- For removal of SO2, SOX, NOX, H2S, H2O, CO2 and more
- For a continuous flow of pure gas
Specifications
Model | GPS20Z2 | GPS30Z2 | GPS50Z2 | GPS60Z2 |
Gases purified | CDA (air) | |||
Media type | Inorganic | |||
Contaminants removed | Volatile acids (measured in SO2): <1 ppt | |||
Volatile bases (measured in NH3): <10 ppt | ||||
Refractory compounds (measured as HMDSO): <1 ppt | ||||
Condensable organics (measured as Toluene): <1 ppt | ||||
Moisture (H2O): <100 ppt | ||||
Operating pressure range | 5.51-17.23 bar (80-250 psig) | |||
Pressure drop | <15 psi @ 100 psig and max rated flow | |||
Maximum flow rate | 20 Nm3/hr (311 slm) |
30 Nm3/hr (466 slm) |
50 Nm3/hr (776 slm) |
60 Nm3/hr (932 slm) |
Gas operating temperature | 15°–40°C (60°–104°F) | |||
Outlet filtration (ISO Class 1) | ISO Class 1 (<10 particles per m3 @ 0.1 μm, <2 particles per m3 at 0.2 µm) | |||
Leak rating | 1 × 10-9 atm cc/sec |
Model | GPS90Z2 | GPS100Z2 | GPS120Z2 |
Gases purified | CDA (air) | ||
Media type | Inorganic | ||
Contaminants removed | Volatile acids (measured in SO2): <1 ppt | ||
Volatile bases (measured in NH3): <10 ppt | |||
Refractory compounds (measured as HMDSO): <1 ppt | |||
Condensable organics (measured as Toluene): <1 ppt | |||
Moisture (H2O): <100 ppt | |||
Operating pressure range | 5.51-17.23 bar (80-250 psig) | ||
Pressure drop | <15 psi @ 100 psig and max rated flow | ||
Maximum flow rate | 90 Nm3/hr (1397 slm) |
100 Nm3/hr (1553 slm) |
120 Nm3/hr (1863 slm) |
Gas operating temperature | 15°–40°C (60°–104°F) | ||
Outlet filtration (ISO Class 1) | ISO Class 1 (<10 particles per m3 @ 0.1 μm, <2 particles per m3 at 0.2 µm) | ||
Leak rating | 1 × 10-9 atm cc/sec |
Successfully Opted for software Updates