Wafergard® SG Gas Filters
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- Photovoltaic process gases
- Display manufacturing process gases
- Gas cabinets
- Valve manifold boxes
- Gas panels
Specifications
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Part Number | Product Type | Maximum Flow Rate | Fitting Size and Type | Length |
---|---|---|---|---|
WGFG02PR1 | Wafergard® SG F Mini XL gas filter | 120 slpm | 1/4" gasket seal (VCR® compatible) | 127 mm (5.00") |
WGFG02PS1 | Wafergard® SG F Mini XL gas filter | 120 slpm | 1/4" compression seal (Swagelok® compatible) | 115.5 mm (4.55") |
WGFG32PR1 | Wafergard® SG F Mini XL gas filter | 120 slpm | 1/2" gasket seal (VCR® compatible) | 133.5 mm (5.26") |
WGFG32PS1 | Wafergard® SG F Mini XL gas filter | 120 slpm | 3/8" compression seal (Swagelok® compatible) | 119.3 mm (4.70") |
WGFG50PR1 | Wafergard® SG F Mini XL gas filter | 120 slpm | 1/2" gasket seal (VCR® compatible) | 127 mm (5.00") |
WGFGMBPRF2 | Wafergard® SG Max gas filter | 500 slpm | 1/4" gasket seal (compatible with VCR fitting) male inlet/ female outlet | 141.2 mm (5.6") |
WGFGMBRR2 | Wafergard® SG Max gas filter | 500 slpm | 1/4" gasket seal (VCR® compatible) | 127 mm (5.00") |
WGFGMBRR4 | Wafergard® SG Max gas filter | 1000 slpm | 1/2" gasket seal (VCR® compatible) | 127 mm (5.00") |
WGFGMBSS2 | Wafergard® SG Max gas filter | 500 slpm | 1/4" compression seal (Swagelok® compatible) | 112.7 mm (4.44") |
WGFGMBSS3 | Wafergard® SG Max gas filter | 1000 slpm | 3/8" compression seal (Swagelok® compatible) | 117.9 mm (4.64") |
WGFGMBSS4 | Wafergard® SG Max gas filter | 1000 slpm | 1/2" compression seal (Swagelok® compatible) | 118.7 mm (4.67") |
WGFGT1PR1 | Wafergard® SG F Micro gas filter | 60 slpm | 1/4" gasket seal (VCR® compatible) | 84.1 mm (3.31") |
WGFGT1PS1 | Wafergard® SG F Micro gas filter | 60 slpm | 1/4" compression seal (Swagelok® compatible) | 73.7 mm (2.90") |
YY5001HR1 | Wafergard® SG PA gas filter | 60 slpm | 1/4" gasket seal (VCR® compatible) | 84.1 mm (3.31") |
YY5001HS1 | Wafergard® SG PA gas filter | 60 slpm | 1/4" compression seal (Swagelok® compatible) | 73.7 mm (2.90") |
YY5002PR1 | Wafergard® SG PAL gas filters | 120 slpm | 1/4" gasket seal (VCR® compatible) | 127.0 mm (5.00") |
YY5002PS1 | Wafergard® SG PAL gas filters | 120 slpm | 1/4" compression seal (Swagelok® compatible) | 115.5 mm (4.55") |
YY5032PR1 | Wafergard® SG PAL gas filters | 200 slpm | 3/8" Gasket seal (VCR® compatible) | 133.5 mm (5.26") |
YY5032PS1 | Wafergard® SG PAL gas filters | 200 slpm | 3/8" compression seal (Swagelok® compatible) | 119.3 mm (4.70") |