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  • Brand Name
  • Chemistry
Best-in-class, point-of-dispense CMP slurry filter to prevent micro-scratches
Brand Name
  • Planarcap®
Chemistry
  • Slurry
Feature Size (Layer)
  • <10 nm
  • 14-22 nm
  • 28-90 nm
  • >90 nm
Installation Point
  • Point of Dispense
Best in class, low-temperature dilute acid filter
Brand Name
  • Intercept®
Chemistry
  • Dilute Acids
Feature Size (Layer)
  • 14-22 nm
  • 28-90 nm
  • >90 nm
Installation Point
  • Point of Tool
Best-in-class, bulk CMP slurry filter for sub 45 nm technology nodes to prevent micro-scratches
Brand Name
  • Planargard®
Chemistry
  • Slurry
Feature Size (Layer)
  • <10 nm
  • 14-22 nm
  • 28-90 nm
  • >90 nm
Installation Point
  • Bulk
Point-of-dispense CMP slurry filter to prevent micro-scratches
Brand Name
  • Planarcap®
Chemistry
  • Slurry
Feature Size (Layer)
  • >90 nm
Installation Point
  • Point of Dispense
Bulk CMP slurry filter for 65 nm or greater technology nodes to prevent micro-scratches
Brand Name
  • Planargard®
Chemistry
  • Slurry
Feature Size (Layer)
  • 28-90 nm
  • >90 nm
Installation Point
  • Bulk
Point-of-dispense CMP slurry filter to prevent micro-scratches
Brand Name
  • Planarcap®
Chemistry
  • Slurry
Feature Size (Layer)
  • 28-90 nm
  • >90 nm
Installation Point
  • Point of Dispense
Point-of-tool CMP slurry filter for 110 nm technology nodes to prevent micro-scratches
Brand Name
  • Solaris®
Chemistry
  • Slurry
Feature Size (Layer)
  • 28-90 nm
  • >90 nm
Installation Point
  • Point of Tool
Point of tool CMP slurry filter manifold for all technology nodes to prevent micro-scratches
Brand Name
  • Solaris®
Chemistry
  • Slurry
Feature Size (Layer)
  • <10 nm
  • 14-22 nm
  • 28-90 nm
  • >90 nm
Installation Point
  • Point of Tool
Best-in-class, bulk CMP slurry filter for sub 45 nm technology nodes to prevent micro-scratches
Brand Name
  • Solaris®
Chemistry
  • Slurry
Feature Size (Layer)
  • <10 nm
  • 14-22 nm
  • 28-90 nm
  • >90 nm
Installation Point
  • Point of Tool
Point-of-tool CMP slurry filter for 65 nm or greater technology nodes to prevent micro-scratches
Brand Name
  • Solaris®
Chemistry
  • Slurry
Feature Size (Layer)
  • >90 nm
Installation Point
  • Point of Tool
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