Solaris® CL Filter
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- Industry: Semiconductor (CMP)
- Chemistry: Slurry
- Installation Point: Point-of-Tool
Specifications
Materials: | Media: Wrapped melt-blown polypropylene |
O-ring: Ethylene-Polypropylene Rubber (EPR) | |
Operating conditions: | Maximum forward pressure: 50 PSI @ 20°C (68°F) |
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