Solid Chemical Delivery Systems


Featured White Paper

Reducing Contamination Points in Clean Chemical Delivery from Manufacture through Point of Use

Featured White Paper

Reducing Contamination Points in Clean Chemical Delivery from Manufacture through Point of Use

Featured White Paper

Reducing Contamination Points in Clean Chemical Delivery from Manufacture through Point of Use
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  • Chemistries
  • Dimensions
  • OEM Tool
  • Industry
  • Process
ProE-Vap® 100 Delivery Systems at Entegris – the industry-leading chemical delivery systems since 1966.
Chemistries
  • HfCl4
  • ZrCl4
Dimensions
  • 257 mm (10.12") H
  • 139.7 mm (5.5") W
OEM Tool
  • ASM Pulsar®
Industry
  • Semiconductor
ProE-Vap® 200 Delivery Systems at Entegris – the industry-leading chemical delivery systems since 1966.
Chemistries
  • AlCl3
Dimensions
  • 331.31 mm (13.04") H
  • 243.84 mm (9.6") W
OEM Tool
  • Tokyo Electron TELINDY™
  • Lam® Research
Industry
  • Semiconductor
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