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  • Chemistries
  • Dimensions
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ProE-Vap® 100 Delivery Systems at Entegris – the industry-leading chemical delivery systems since 1966.
Chemistries
  • HfCl4
  • ZrCl4
Dimensions
  • 257 mm (10.12") H
  • 139.7 mm (5.5") W
OEM Tool
  • ASM Pulsar®
Industry
  • Semiconductor
ProE-Vap® 200 Delivery Systems at Entegris – the industry-leading chemical delivery systems since 1966.
Chemistries
  • AlCl3
Dimensions
  • 331.31 mm (13.04") H
  • 243.84 mm (9.6") W
OEM Tool
  • Tokyo Electron TELINDY™
  • Lam® Research
Industry
  • Semiconductor
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