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Check Valves

All PFA and PTFE material wetted surfaces and an O-ring free-design provide corrosion resistance and reduce contamination in high-purity chemical applications.

Corrosion-resistant Galtek® check valves reduce contamination potential in your high-purity chemical applications and provide clean delivery of sophisticated chemicals. An o-ring-free design provides a simple, clean, compact valve with a high flow rate and increased reliability. We offer a full range of 1/4", 1/2", 3/4" and 1" orifice check valves with a variety of industry standard end connections including Flaretek® and PureBond®.

VIEW OUR VALVE SELECTION TOOL

Narrow Your Selection
  • Port Connection
  • Port Size
  • Industry
  • Process
Galtek® Check Valves, 3/4" Orifice, O-ring Free Design
Galtek® Check Valves, 3/4" Orifice, O-ring Free Design
Galtek® Check Valves, 3/4" Orifice, O-ring Free Design
All PFA and PTFE material wetted surfaces and an O-ring-free design provide corrosion resistance and reduce contamination in high-purity chemical applications. 3/4" orifice with numerous end connections.
Port Connection
  • PrimeLock®
  • Flaretek®
  • PureBond® pipe
 Port Size
  • 3/4"
 Industry
  • Semiconductor
  • LED
  • Flat Panel Display
  • Data Storage
 Process
  • Bulk Chemical Delivery
  • CMP
  • Photolithography
  • Wet Etch and Clean
  • Lithography
  • Cleaning
  • Substrate Cleaning
  • Substrate - IPA
  • Substrate - Polishing
  • Media - Cleaning
  • Media - IPA
  • HDD Assembly - Cleaning
  • Magnetic Head - Photolithography
  • Magnetic Head - Wet Etch and Clean
  • Magnetic Head - CMP
  • HGA/HSA Assembly - Cleaning
Galtek® Check Valves, 1" Orifice, O-ring Free Design
Galtek® Check Valves, 1" Orifice, O-ring Free Design
Galtek® Check Valves, 1" Orifice, O-ring Free Design
All PFA and PTFE material wetted surfaces and an O-ring-free design provide corrosion resistance and reduce contamination in high-purity chemical applications. 1" orifice with numerous end connections.
Port Connection
  • PrimeLock®
  • Flaretek®
  • PureBond® pipe
 Port Size
  • 1"
  • 1 1/4"
 Industry
  • Semiconductor
  • LED
  • Flat Panel Display
  • Data Storage
 Process
  • Bulk Chemical Delivery
  • CMP
  • Photolithography
  • Wet Etch and Clean
  • Lithography
  • Cleaning
  • Substrate Cleaning
  • Substrate - IPA
  • Substrate - Polishing
  • Media - Cleaning
  • Media - IPA
  • HDD Assembly - Cleaning
  • Magnetic Head - Photolithography
  • Magnetic Head - Wet Etch and Clean
  • Magnetic Head - CMP
  • HGA/HSA Assembly - Cleaning
Galtek® Check Valves, 1/2" Orifice, O-ring Free Design
Galtek® Check Valves, 1/2" Orifice, O-ring Free Design
Galtek® Check Valves, 1/2" Orifice, O-ring Free Design
All PFA and PTFE material wetted surfaces and an O-ring-free design provide corrosion resistance and reduce contamination in high-purity chemical applications. 1/2" orifice with numerous end connections.
Port Connection
  • PrimeLock®
  • Flaretek®
  • PureBond® pipe
  • Super 300 Type Pillar®
  • FNPT
 Port Size
  • 1/2"
 Industry
  • Semiconductor
  • LED
  • Flat Panel Display
  • Data Storage
 Process
  • Bulk Chemical Delivery
  • CMP
  • Photolithography
  • Wet Etch and Clean
  • Lithography
  • Cleaning
  • Substrate Cleaning
  • Substrate - IPA
  • Substrate - Polishing
  • Media - Cleaning
  • Media - IPA
  • HDD Assembly - Cleaning
  • Magnetic Head - Photolithography
  • Magnetic Head - Wet Etch and Clean
  • Magnetic Head - CMP
  • HGA/HSA Assembly - Cleaning
Galtek® Check Valves, 1/4" Orifice, O-ring Free Design
Galtek® Check Valves, 1/4" Orifice, O-ring Free Design
Galtek® Check Valves, 1/4" Orifice, O-ring Free Design
All PFA and PTFE material wetted surfaces and an O-ring-free design provide corrosion resistance and reduce contamination in high-purity chemical applications. 1/4" orifice with numerous end connections.
Port Connection
  • PrimeLock®
  • Flaretek®
  • PureBond® pipe
  • Quikgrip®
  • Super 300 Type Pillar®
  • FNPT
  • MNPT
 Port Size
  • 1/4"
 Industry
  • Semiconductor
  • LED
  • Flat Panel Display
  • Data Storage
 Process
  • Bulk Chemical Delivery
  • CMP
  • Photolithography
  • Wet Etch and Clean
  • Lithography
  • Cleaning
  • Substrate Cleaning
  • Substrate - IPA
  • Substrate - Polishing
  • Media - Cleaning
  • Media - IPA
  • HDD Assembly - Cleaning
  • Magnetic Head - Photolithography
  • Magnetic Head - Wet Etch and Clean
  • Magnetic Head - CMP
  • HGA/HSA Assembly - Cleaning
Related Product Categories
EP PFA Valves

We offer a comprehensive line of reliable high-flow, manual and pneumatic valves that meet your needs for large volume chemical delivery.  
Integra® Valves

High-purity, corrosion-resistant Integra® valves offer reliable performance in high-purity, aggressive chemical applications. With no external metal parts, the valves are safe and will not corrode in harsh environments. 
Solenoid Valves

All wetted parts in our powerful, compact 1/4" solenoid valves are designed for high-purity and corrosive applications. 
Stack Valves

This innovatively designed 3-way valve has the ports located on one plane so they may be easily stacked side by side, significantly reducing footprint in your fluid handling system. 
Plug Valves

We offer Magnaflo® and fast acting Galtek® plug valves that provide durable, corrosion-resistance in aggressive chemical applications. For use in the same applications as traditional ball valves.
Stopcock Valves

We offer reliable stopcock valves for any instrumentation need. 1/8" orifice valves are available in 2-way, 2-way 90° and 3-way configurations.
Manifolds and Assemblies

Whether a subassembly or an entire system, Entegris can fabricate your unique product utilizing plastic machining, welding, bonding and/or general fabrication. 
SG Series Valves

Ideal where space is limited, our Galtek® SG Series valves set the standard for small valves with all-PFA wetted surfaces used in CMP and high purity semiconductor fluid handling applications. 
Valve Accessories

Learn about the numerous accessories available that help you secure and maintain Entegris valves used in ultrapure, corrosive fluid applications. 
Cynergy® Valves

Cynergy® valves with beadless weld or industry standard clamp connections are designed for applications involving ultrapure water, water for injection, corrosive chemistries or biotechniques.
Needle/Metering Valves

Our portfolio of Accuflo™ metering and needle valves, and Galtek® needle valves provide reliable options for you to accurately control media flow in corrosive environments.
Integra® Plus WS ESD Valves

The weir-style valve body design streamlines the flow path and eliminates dead volume; ideal in CMP slurry and bulk chemical applications, pneumatic actuation.

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