Accurate, repeatable, real-time critical process monitoring without intrusion or interruptions.
Advanced, optically based monitoring and high-performance concentration monitors enable greater process efficiency for BEOL, FEOL, and sub-fab delivery chemical systems. Our portfolio includes solutions for in-situ and online applications. InVue® concentration monitors, dissolved oxygen sensors, and refractometers provide customers with in-line, real-time, scalable monitoring and detection systems in a compact footprint. SemiChem APM (Advanced Process Monitor) provides lab quality measurement in a durable, reliable, online platform.