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Manifolds and Assemblies

Learn how we can develop all types of specialty plastic products within a fluid handling network and modify existing Entegris products to meet your unique needs.

Whether a subassembly or an entire system, Entegris can fabricate your unique product utilizing plastic machining, welding, bonding and/or general fabrication. Our experience in fluid handling and with PFA will result in a strong, durable, chemically-resistant solution that meets your needs.

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  • Port Connection
  • Valve Type
  • Industry
  • Process
PureBond® Assemblies
PureBond® Assemblies
PureBond® Assemblies
Ask us about designing your durable, PFA piping system. Our experience in fluid handling systems, in design support and in CAD applications will ensure our design addresses your needs.
Port Connection
  • N/A
 Valve Type
  • N/A
 Industry
  • Semiconductor
  • LED
  • Flat Panel Display
  • Data Storage
 Process
  • Bulk Chemical Delivery
  • CMP
  • Photolithography
  • Wet Etch and Clean
  • Lithography
  • Cleaning
  • Substrate Cleaning
  • Substrate - IPA
  • Substrate - Polishing
  • Media - Cleaning
  • Media - IPA
  • HDD Assembly - Cleaning
  • Magnetic Head - Photolithography
  • Magnetic Head - Wet Etch and Clean
  • Magnetic Head - CMP
  • HGA/HSA Assembly - Cleaning
Cynergy® Subassemblies
Cynergy® Subassemblies
Cynergy® Subassemblies
When a more permanent connection is required, customize your fluid-handling network with Cynergy® beadless subassemblies.
Port Connection
  • Cynergy® clamp
  • Cynergy® weld
 Valve Type
  • PFA Weir
 Industry
  • Semiconductor
  • LED
  • Flat Panel Display
  • Data Storage
  • Life Sciences
 Process
  • Bulk Chemical Delivery
  • CMP
  • Photolithography
  • Wet Etch and Clean
  • Lithography
  • Cleaning
  • Substrate Cleaning
  • Substrate - IPA
  • Substrate - Polishing
  • Media - Cleaning
  • Media - IPA
  • HDD Assembly - Cleaning
  • Magnetic Head - Photolithography
  • Magnetic Head - Wet Etch and Clean
  • Magnetic Head - CMP
  • HGA/HSA Assembly - Cleaning
  • Bioprocessing
Dymension® Valve Manifolds
Dymension® Valve Manifolds
Dymension® Valve Manifolds
Dymension® valve manifolds enable complex fluid control in a minimized footprint. Ideal in CMP polishers and process tools where space is limited. Proven FlareMount™ flared sealing technology provides a robust, leak-free seal.
Port Connection
  • N/A
 Valve Type
  • Poppet
 Industry
  • Semiconductor
  • LED
  • Flat Panel Display
  • Data Storage
  • Life Sciences
 Process
  • Bulk Chemical Delivery
  • CMP
  • Photolithography
  • Wet Etch and Clean
  • Lithography
  • Cleaning
  • Substrate Cleaning
  • Substrate - IPA
  • Substrate - Polishing
  • Media - Cleaning
  • Media - IPA
  • HDD Assembly - Cleaning
  • Magnetic Head - Photolithography
  • Magnetic Head - Wet Etch and Clean
  • Magnetic Head - CMP
  • HGA/HSA Assembly - Cleaning
  • Bioprocessing
  • Fine Chemicals
  • Biotechnology
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EP PFA Valves

We offer a comprehensive line of reliable high-flow, manual and pneumatic valves that meet your needs for large volume chemical delivery. These valves provide chemical resistance in corrosive applications throughout semiconductor, LCD, TFT and flat panel display markets.

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Integra® Valves

High-purity, corrosion-resistant Integra® valves offer reliable performance in high-purity, aggressive chemical applications. With no external metal parts, the valves are safe and will not corrode in harsh environments. The high-temperature version is rated to 180°C fluid.

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Solenoid Valves

All wetted parts in our powerful, compact 1/4" solenoid valves are designed for high-purity and corrosive applications. To meet all of your fluid control needs, our solenoid valve is available in 2-way and 3-way configurations in 12 and 24 VDC, and 100, 115 and 230 VAC.

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Stack Valves

This innovatively designed 3-way valve has the ports located on one plane so they may be easily stacked side by side, significantly reducing footprint in your fluid handling system. All wetted surfaces are PFA and PTFE providing chemical resistance suitable for use with high purity chemicals and DI water.

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Plug Valves

We offer Magnaflo® and fast acting Galetk® plug valves for use in the same applications as traditional ball valves. These valves couple corrosion resistance and a high-purity flow path, offering durable, high flow solutions to aggressive chemical applications.

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Stopcock Valves

We offer reliable stopcock valves for any instrumentation need. 1/8" orifice valves are available in 2-way, 2-way 90° and 3-way configurations. Various port options are available to meet your fluid handling system needs.

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Check Valves

Corrosion-resistant Galtek® check valves reduce contamination potential in your high-purity chemical applications and provide clean delivery of sophisticated chemicals. An o-ring-free design provides a simple, clean, compact valve with a high flow rate and increased reliability. We offer a full range of 1/4", 1/2", 3/4" and 1" orifice check valves with a variety of industry standard end connections including Flaretek® and PureBond®.

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SG Series Valves

Ideal where space is limited, our Galtek® SG Series valves set the standard for small valves with all-PFA wetted surfaces used in CMP and high purity semiconductor fluid handling applications. These 1/4" orifice valves are available in 2-way and 3-way, manual and pneumatic configurations.

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Valve Accessories

Learn about the numerous accessories available that help you secure and maintain Entegris valves used in ultrapure, corrosive fluid applications. Accessories include mounting bases, repair kits, tool kits and safety lock out devices.

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Cynergy® Valves

Whether your applications involve ultrapure water, water for injection, corrosive chemistries or biotechniques, Cynergy® valves have a beadless weld connection or an industry standard clamp interface for adaptability to existing equipment and compliance with cGMP standards.

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Needle/Metering Valves

Our portfolio of Accuflo™ metering and needle valves, and Galtek® needle valves provide reliable options for you to accurately control media flow. The PFA/PTFE wetted construction offers unrivaled durability in your corrosive environments. In-line, angled, and panel mount manual configurations provide enhanced control of sophisticated chemicals in semiconductor and other markets requiring adjusted flow.

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