E1250 Filter Housing
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- Chemically purify atmospheric pressure air used in air handling systems of microlithography tools, including exposure tools and photoresist coater/developer tools
- Room filtration in smaller facilities
- A make-up air filter to reduce elevated ambient contamination levels in advanced technology facilities
Specifications
Length | 1430 mm (56.3") |
Width | 664 mm (26.1") |
Height | 664 mm (26.1") |
Weight (empty) | 73 kg (160 lbs) |
Weight (with filters) | 98 kg (215 lbs) |
Flow (maximum) | 2125 m3/h (1250 cfm) |
Flow (typical) | 850 m3/h (500 cfm) |
Pressure drop (typical with three chemical filters) | 380 Pa (1.6 in water column) |
Clean Dry Air (CDA) | Required for pneumatic actuator |
CDA compression fitting | 0.635 cm (0.25") |
CDA pressure | 517 kPa (75 psig) |
CDA flow | Negligible |
Successfully Opted for software Updates
Part Number | Product Type |
---|---|
ESI000980 | E1250 filter housing |