Filter Housings and Stand-alone Filter Cabinets


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  • Process
Advanced protection for optics and resists. Chemically purify environmental air used in photolithography exposure tools.
Contaminants
  • Acids
  • Bases
Industry
  • Semiconductor
  • Data Storage
Process
  • Photolithography
Advanced second-layer protection for scanner systems and small environments such as data centers; chemically purifies environmental air if additional protection is required or air handler systems are absent
Industry
  • Semiconductor
  • Data Storage
  • LED
Process
  • Photolithography
  • Magnetic Head - Photolithography
  • Lithography
Advanced protection for optics and chemically amplified resists for lower flow scanner systems. Chemically purifies subfab or cleanroom air used for photolithography exposure tools.
Contaminants
  • Acids
  • Organics
Industry
  • Semiconductor
  • Data Storage
Process
  • Photolithography
  • Magnetic Head - Photolithography
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