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E2000 Pre-filter Housing and Air Circulation System

Provides advanced second-layer protection against organic gases, including volatile compounds, for scanner systems and cleanup of small environments such as data centers. 

  • Select adsorption chemistry to maximize capacity for target AMC (airborne molecular contamination)
  • Matches existing OEM scanner filtration systems
  • Compact, stand-alone solution for filtering smaller facilities
  • Easy retrofit for all applications
  • Dedicated team of analytical service experts to support all filtration system technology and AMC measurement pertaining to filter system interdependency and life performance
  • In compliance with Nikon, ASML, and Canon environment specifications
  • Read More Read Less
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