E2000 Pre-filter Housing and Air Circulation System
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- Scanner optics protection
- Data center and facility air purification
- Photolithography
- Multilayer AMC removal
Specifications
Successfully Opted for software Updates
Part Number | Configuration |
---|---|
ESI005774-01 | Bottom discharge with fan |
ESI005774-02 | Top discharge with fan |
ESI005774-03 | Bottom discharge no fan |
ESI005774-04 | Top discharge no fan |
ESI005892-01 | Set of eight filters for organics removal |
For other media types please contact Entegris.