Stepper and Scanner Filters


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Advanced scanner optics and resist protection. The SilverSet® Chemical Air Filter System offers advanced scanner lens protection for 248 nm and 193 nm dry and immersion scanners.
Contaminants
  • Acids
  • Bases Organics
Industry
  • Semiconductor
  • Data Storage
  • LED
Process
  • Photolithography
  • Magnetic Head - Photolithography
  • Lithography
VaporSorb™ CSP-32 Chemical Air Filters offer advanced protection for exposure tool optics and photoresists.
Contaminants
  • Acids
  • Bases Organics
Industry
  • Semiconductor
  • Data Storage
  • LED
Process
  • Photolithography
  • Magnetic Head - Photolithography
  • Lithography
Advanced second-layer protection for scanner systems and small environments such as data centers; chemically purifies environmental air if additional protection is required or air handler systems are absent
Industry
  • Semiconductor
  • Data Storage
  • LED
Process
  • Photolithography
  • Magnetic Head - Photolithography
  • Lithography
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