Wafergard® SL 1.5" W-Seal Gas Filter
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- Ultrapure gas lines
- High-temperature applications
- Dynamic-pressure applications
- Stainless steel filters for inert, hydride, and CO gases, nickel filters for inert and reactive gases
Specifications
Materials: | Membrane | Stainless steel or patented, sintered nickel |
Housing, base block and end cap | 316L double-melt stainless steel | |
Particle retention: | Nickel filters | Greater than 99.9999999% removal of all particles (referenced at the most penetrating particle size) |
Stainless steel filters | Greater than 99.9999% removal of all particles (referenced at the most penetrating particle size) | |
Downstream cleanliness: | Particles | Less than 0.03 particles/liter (<1 particle/ft3) greater than 0.01 µm |
Volatiles | Volatile outgassing of H2O, O2 and THC is below detectable limits (by RGA and FID at room temperature) | |
Operating conditions: | Maximum operating pressure | 1 MPa (10 bar, 145 psid) |
Maximum forward/reverse | 1 MPa (10 bar, 145 psid) | |
Maximum operating temperature | 400°C (752°F) | |
Removal rating: | ≥ 0.003 µm | |
Surface finish interior: | ≤ 5 µin Ra | |
Helium leak rating: | Qualified | 2 x 10-10 cc/min |
Tested | 1 x 10-9 cc/min |
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