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Surface Mount Gas Filters

All-metal gas filters for ultrapure surface-mount applications.

Available with stainless steel or nickel filter elements, Wafergard® gas filters provide ultimate process protection, superior corrosion-resistance, and excellent compatibility with inert, hydride, and reactive gases. The surface-mount design consumes less space on gas panels and reduces parts inventories and variations. Our surface mount gas filter portfolio includes C-Seal 1.125" and W-Seal 1.125" or 1.5" formats.

Narrow Your Selection
  • Process
Wafergard® SL 1.125" C-Seal Gas Filter
Wafergard® SL 1.125" C-Seal Gas Filter
Wafergard® SL 1.125" C-Seal Gas Filter
Wafergard SL 1.125" C-Seal all-metal gas filters dramatically reduce footprint and provide ultrapure filtration in a surface-mount design
Fitting Size
  • 1.125"
 Fitting Type
  • C-Seal
 Process
  • Deposition
  • Dry Etch
  • Ion Implantation
  • Photolithography
Wafergard® SL 1.5" W-Seal Gas Filter
Wafergard® SL 1.5" W-Seal Gas Filter
Wafergard® SL 1.5" W-Seal Gas Filter
Wafergard SL 1.5" W-Seal Mini, corrosion-resistant filters provide the industry’s best gas filter for ultrapure surface-mount applications
Fitting Size
  • 1.5"
 Fitting Type
  • W-Seal
 Process
  • Deposition
  • Dry Etch
  • Ion Implantation
  • Photolithography
Wafergard® SL 1.125" W-Seal Gas Filter
Wafergard® SL 1.125" W-Seal Gas Filter
Wafergard® SL 1.125" W-Seal Gas Filter
With a 1.125" square base, these SurfaceLine® filters provide the industry's smallest surface-mount gas filter
Fitting Size
  • 1.125"
 Fitting Type
  • W-Seal
 Process
  • Photolithography
  • Deposition
  • Dry Etch
  • Ion Implantation
Wafergard® C2 1.125" C-seal Surface Mount Sandwich Gas Filters
Wafergard® C2 1.125" C-seal Surface Mount Sandwich Gas Filters
Wafergard® C2 1.125" C-seal Surface Mount Sandwich Gas Filters
Provide the industry’s best filter in a compact surface-mount design.
Fitting Size
  • 1.125"
 Fitting Type
  • C-Seal
 Process
  • Ion Implantation
  • Deposition
  • Dry Etch
  • Photolithography
Related Product Categories
Other Gas Filters

Wafergard® GN gas filter guns are an easy-to-use, lightweight POU (point-of-use) solution to control gas contamination. The filter element is an exclusive Entegris design used in various semiconductor processes.
In-Line PTFE Gas Filters

Our gas filters provide superior particulate filtration to minimize pressure drop and to maximize filter lifetime. Choose from Wafergard® and Linegard™ in-line gas filters.
In-Line Stainless Steel Gas Filters

Entegris' in-line stainless steel gas filters are designed for use in high-pressure and high-temperature applications. They're easy to install without requiring design changes.
In-Line Nickel Gas Filters

Entegris' ultrapure nickel filters are the cleanest and most efficient gas filtration products for high-pressure, high-temperature applications.
In-line Alloy-22 Gas Filters

Wafergard® IV alloy-22 (commonly referred to by the brand name HASTELLOY® C-22® alloy) filters are the cleanest, most efficient, all-metal filters available for corrosive and ultrapure environments.
Vent Gas Filters

Our gas filters provide superior particulate filtration to efficiently control contamination in a variety of life sciences, microelectronics, food and beverage, and other applications.
Bulk Gas Filters and Housings

Compatible with a wide range of bulk gases, including CDA N2, Ar, O2, H2, and He. Each solution is designed based on the flow, supply pressure, and incoming supply purity.
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