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Mask Packages

Mask Packages engineered to provide secure mask protection and precise automation interface, increasing yields and minimizing unscheduled downtime

We offer an array of Mask Packages that offer users the advantages of a cost-effective design combined with an extremely high degree of contamination protection.

Featured White Paper

download-pdf
Enabling Advanced Lithography: The Challenges of Storing and Transporting EUV Reticles
Download Now

Featured White Paper

download-pdf
Enabling Advanced Lithography: The Challenges of Storing and Transporting EUV Reticles
Download Now

Featured White Paper

download-pdf
Enabling Advanced Lithography: The Challenges of Storing and Transporting EUV Reticles
Download Now
Narrow Your Selection
  • Box Material
  • Mask Size
  • Industry
  • Process
H60 Series Mask Packages
H60 Series Mask Packages
H60 Series Mask Packages
Entegris’ line of mask packages, H60 series, hold one mask or reticle and are manufactured and packaged in a cleanroom environment.
Box Material
  • HDPE
  • Polypropylene
  • Black polypropylene
 Mask Size
  • 51 mm sq. (2" sq.) to 152 mm sq. (6" sq.)
 Space for Pellicles
  • None
  • Top
  • Bottom
  • Double
 Industry
  • Semiconductor
H92 Series Mask Packages
H92 Series Mask Packages
H92 Series Mask Packages
High impact resistance H92 Series mask packages provide excellent security for masks or reticles with pellicles.
Box Material
  • Clear polycarbonate
  • Black polycarbonate
  • ABS
 Mask Size
  • 127 mm sq. (5" sq.) to 178 mm sq. (7" sq.)
 Space for Pellicles
  • None
  • Top
  • Bottom
  • Double
 Industry
  • Semiconductor
B80 Series Mask Packages
B80 Series Mask Packages
B80 Series Mask Packages
Entegris’ B80 series of mask packages provide excellent security for masks and reticles with pellicles.
Box Material
  • Clear polycarbonate
  • Black polycarbonate
  • Amber antistatic ABS
  • Clear Bayon™
 Mask Size
  • 76 mm sq. (3" sq.) to 203 mm sq. (8" sq.)
 Space for Pellicles
  • None
  • Top
  • Bottom
  • Double
 Industry
  • Semiconductor
Single Mask Pack 625
Single Mask Pack 625
Single Mask Pack 625
Entegris’ single mask packages 625 provide excellent security for masks and reticles with pellicles.
Box Material
  • Black polycarbonate
  • CNT polycarbonate
  • PMMA polycarbonate
 Mask Size
  • 152 mm sq. (6" sq.)
 Space for Pellicles
  • None
  • Top
  • Bottom
  • Double
 Industry
  • Semiconductor
H68 Series Mask Packages
H68 Series Mask Packages
H68 Series Mask Packages
Entegris’ mask packaging H68 series are ideal for masks or reticles with pellicles
Industry
  • Semiconductor
 Process
  • Photolithography
Related Product Categories
Mask Carriers and Shipping Boxes

Entegris offers an array of Mask Carriers and Shipping Boxes designed to protect, store and transport valuable masks. 
Reticle Pods and Purge Cabinets

These cost-effective, reticle pods and purge cabinets protect, store and transport valuable lithography reticles, and provide an extremely high degree of contamination protection.

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