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  • Box Material
  • Mask Size
  • Mask Thickness
  • Industry
  • Process
Entegris’ mask packaging, H91 series, are ideal for masks or reticles with pellicles.
Box Material
  • Clear polysulfone
  • Black polypropylene
  • Carbon filled black polypropylene
Mask Size
  • 127 mm sq. (5" sq.)
Mask Thickness
  • 6.4 mm (0.25")
  • 1.5 mm (0.06")
  • 2.3 mm (0.09")
  • 3.1 mm (0.12")
  • 3.8 mm (0.15")
Space for Pellicles
  • None
  • Top
  • Bottom
  • Double
Entegris’ line of mask packages, H60 series, hold one mask or reticle and are manufactured and packaged in a cleanroom environment.
Box Material
  • HDPE
  • Polypropylene
  • Black polypropylene
Mask Size
  • 51 mm sq. (2" sq.) to 152 mm sq. (6" sq.)
Space for Pellicles
  • None
  • Top
  • Bottom
  • Double
Industry
  • Semiconductor
High impact resistance H92 Series mask packages provide excellent security for masks or reticles with pellicles.
Box Material
  • Clear polycarbonate
  • Black polycarbonate
  • ABS
Mask Size
  • 127 mm sq. (5" sq.) to 178 mm sq. (7" sq.)
Space for Pellicles
  • None
  • Top
  • Bottom
  • Double
Industry
  • Semiconductor
Entegris’ B80 series of mask packages provide excellent security for masks and reticles with pellicles.
Box Material
  • Clear polycarbonate
  • Black polycarbonate
  • Amber antistatic ABS
  • Clear Bayon™
Mask Size
  • 76 mm sq. (3" sq.) to 203 mm sq. (8" sq.)
Space for Pellicles
  • None
  • Top
  • Bottom
  • Double
Industry
  • Semiconductor
Entegris’ single mask packages 625 provide excellent security for masks and reticles with pellicles.
Box Material
  • Black polycarbonate
  • CNT polycarbonate
  • PMMA polycarbonate
Mask Size
  • 152 mm sq. (6" sq.)
Space for Pellicles
  • None
  • Top
  • Bottom
  • Double
Industry
  • Semiconductor
Entegris’ mask packaging H68 series are ideal for masks or reticles with pellicles
Industry
  • Semiconductor
Process
  • Photolithography
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