H60 Series Mask Packages
Specify Your Part
Part Number:
Interested in an Entegris Product?
To discuss your specific needs, contact your local Entegris representative.
Don't have an Entegris representative?
Contact Us
Request a Quote
Quote Requested
Thank you for requesting a quote. Someone from Entegris will contact you shortly.
Your quote number is {0}.
Top of page
Reference Materials
CAD
CAD drawings may be available for this product. Please use the Part Selector to select a part number to see if they are available.
Applications
- Mask handling
- Reticle handling
Part Numbers
| Part Number | Mask Size | Box Material | Carrier Overall Size | Mask Thickness |
|---|---|---|---|---|
| H60-25-0615 | 64 mm sq. (2.5" sq.) | Polypropylene | 96 mm x 71 mm x 18 mm (3.8" x 2.8" x 0.7") | 1.5 mm (0.06") |
| H60-3035-0615 | 76 mm sq. (3" sq.) + 89 mm sq. (3.5" sq. ) | Polypropylene | 117 mm sq. x 20 mm (4.6" sq. x 0.8") | 1.5 mm (0.06") |
| H60-40-06-0615 | 102 mm sq. (4" sq.) | Polypropylene | 117 mm sq. x 14 mm (4.6" sq. x 0.5") | 1.5 mm (0.06") |
| H60-40-06-67C02 | 102 mm sq. (4" sq.) | Black polypropylene | 117 mm sq. x 14 mm (4.6" sq. x 0.5") | 1.5 mm (0.06") |
| H60-40-09-0615 | 102 mm sq. (4" sq.) | Polypropylene | 117 mm sq. x 14 mm (4.6" sq. x 0.5") | 2.3 mm (0.09") |
| H60-45-06-0615 | 114 mm sq. (4.5" sq.) | Polypropylene | 124 mm sq. x 14 mm (4.9" sq. x 0.05") | 1.52 mm (0.06") |
| H60-45-06-67C02 | 114 mm sq. (4.5" sq.) | Black polypropylene | 124 mm sq. x 14 mm (4.9" sq. x 0.05") | 1.52 mm (0.06") |
| H60-50-0615 | 127 mm sq. (5" sq.) | Polypropylene | 142 mm sq. x 15 mm (5.6" sq. x 0.6") | 2.3 mm (0.09") |
| H60-50-67C02 | 127 mm sq. (5" sq.) | Black polypropylene | 142 mm sq. x 15 mm (5.6" sq. x 0.6") | 2.3 mm (0.09") |
| H60-51-0615 | 127 mm sq. (5" sq.) | Polypropylene | 136.7 mm sq. x 16 mm (5.38" sq. x 0.648") | 2.3 mm (0.09") |
| H60-51-67C02 | 127 mm sq. (5" sq.) | Black polypropylene | 136.7 mm sq. x 16 mm (5.38" sq. x 0.648") | 2.3 mm (0.09") |
| H60-60-0615 | 127 mm sq. (5" sq.) + 152 mm sq. (6" sq.) | Polypropylene | 193 mm sq. x 28 mm (7.6" sq. x 1.1") | 3.1 mm (0.12") |
| H60-60-09-0615 | 152 mm sq. (6" sq.) | Polypropylene | 162 mm sq. x 19 mm (6.4" sq. x 0.8") | 2.3 mm (0.09") |
| H60-60-09-67C02 | 152 mm sq. (6" sq.) | Black polypropylene | 162 mm sq. x 19 mm (6.4" sq. x 0.8") | 2.3 mm (0.09") |
| H60-60-12-0615 | 152 mm sq. (6" sq.) | Polypropylene | 162 mm sq. x 19 mm (6.4" sq. x 0.8") | 3.1 mm (0.12") |
| H60-60-15-0615 | 152 mm sq. (6" sq.) | Polypropylene | 162 mm sq. x 14 mm (6.4" sq. x 0.5") | 3.8 mm (0.15") |
| H60-60-15-67C02 | 152 mm sq. (6" sq.) | Black polypropylene | 162 mm sq. x 14 mm (6.4" sq. x 0.5") | 3.8 mm (0.15") |