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The TX-4 ™ gas cabinet is designed to safely deliver highly toxic gases for semiconductor applications. The manifold is designed to minimize pressure loss, enabling maximum delivery of phosphine, arsine, or germane from sub-atmospheric gas sources.
- Subatmospheric storage and delivery (SAGS type I)
A high-purity, auto-switchover gas distribution system. The PDS Delivery System supplies a continuous flow of process gas, even when the online source cylinder empties.
- Plasma Immersion Doping
- Enriched BF3
- Positive pressure delivery @100 pisg
- Subatmospheric delivery (SAGS type II)
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