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  • Gases
  • System Type
  • Industry
  • Process
The TX-4 ™ gas cabinet is designed to safely deliver highly toxic gases for semiconductor applications. The manifold is designed to minimize pressure loss, enabling maximum delivery of phosphine, arsine, or germane from sub-atmospheric gas sources.
Gases
  • AsH3
  • Ph3
System Type
  • Subatmospheric storage and delivery (SAGS type I)
Industry
  • Semiconductor
Process
  • Deposition
A high-purity, auto-switchover gas distribution system. The PDS Delivery System supplies a continuous flow of process gas, even when the online source cylinder empties.
Gases
  • Enriched BF3
System Type
  • Positive pressure delivery @100 pisg
  • Subatmospheric delivery (SAGS type II)
Industry
  • Semiconductor
Process
  • Plasma Immersion Doping
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