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  • Industry
  • Process
  • System Type
Entegris offers premium gas blends in a single package to reduce the need to co-flow species from multiple cylinders. These precision mixtures provide increased efficiency and user flexibility at the tool. In addition, the delivery of the Enriched BF3+H2 precision mixture through the VAC® package improves cost of ownership. Tungsten transport is reduced, tool glitching is reduced and source life is extended.
Industry
  • Semiconductor
Process
  • Ion Implantation
Chemical Formula
  • 11BF3 + H2
Cylinder Volume
  • 2.2 L
  • 6.6 L
GeF4+ H2 Mixture is one of the premium gas blends Entegris offers in a single package, reducing the need to co-flow species from multiple cylinders.
Industry
  • Semiconductor
Process
  • Ion Implantation
Chemical Formula
  • GeF4 + H2
Cylinder Volume
  • 6.6 L
Entegris offers premium gas blends in a single package reducing the need to co-flow species from multiple cylinders.
Industry
  • Semiconductor
Process
  • Ion implantation
Chemical Formula
  • COF2 + CO2 + CO
Cylinder Volume
  • 2.2 L
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