Entegris offers premium gas blends in a single package to reduce the need to co-flow species from multiple cylinders. These precision mixtures provide increased efficiency and user flexibility at the tool. In addition, the delivery of the Enriched BF3+H2 precision mixture through the VAC® package improves cost of ownership. Tungsten transport is reduced, tool glitching is reduced and source life is extended.
Subatmospheric Delivery (SAGS Type II)