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GeF4+ H2 Mixture is one of the premium gas blends Entegris offers in a single package, reducing the need to co-flow species from multiple cylinders.
Chemical Formula
  • GeF4 + H2
Cylinder Volume
  • 6.6 L
System Type
  • Subatmospheric Delivery (SAGS Type II)
Industry
  • Semiconductor
Entegris offers premium gas blends in a single package to reduce the need to co-flow species from multiple cylinders. These precision mixtures provide increased efficiency and user flexibility at the tool. In addition, the delivery of the Enriched BF3+H2 precision mixture through the VAC® package improves cost of ownership. Tungsten transport is reduced, tool glitching is reduced and source life is extended.
Chemical Formula
  • 11BF3 + H2
Cylinder Volume
  • 2.2 L
  • 6.6 L
System Type
  • Subatmospheric Delivery (SAGS Type II)
Industry
  • Semiconductor
Entegris offers premium gas blends in a single package reducing the need to co-flow species from multiple cylinders.
Chemical Formula
  • COF2 + CO2 + CO
Cylinder Volume
  • 2.2 L
System Type
  • Subatmospheric Delivery (SAGS Type II)
Industry
  • Semiconductor
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