• our science our science Our Science

    • By Industry

      • Life Sciences

      • Microelectronics

        • Semiconductor

        • Data Storage

        • Flat Panel Display

        • LED

        • Solar

      • Industrial

        • Aerospace

        • Chemical Manufacturing

        • Chromatography and Analytical

        • Coatings, Inks, and Adhesives

        • EDM

        • General Industrial

        • Glass Forming

        • Polymer Manufacturing

        • Water Treatment

        • Commercial Air Quality

    • By Role

      • Logic Manufacturers

      • Memory Manufacturers

      • Semiconductor Equipment Manufacturers

      • Chemical Suppliers

      • Bioprocessors

    • By Solution Area

      • Contamination Control

      • Fluid Management

      • Life Sciences

      • Specialty Materials

      • Substrate Handling

    • By Service

      • Analytical Services

      • Field Support Services

      • FOUP Services

      • Life Sciences Contract Development Services

      • Refurbishment Services

      • Regeneration Services

      • Technology Centers

        • China Technology Center

        • Life Sciences Technology Center

  • product catalog product catalog Product Catalog

    • Chemistries

      • Chemical Delivery Systems

        • Solid Chemical Delivery Systems

        • Liquid Chemical Delivery Systems

      • Specialty Chemicals

        • Catalysts

        • Coating, Ink, and Adhesive Ingredients

          • Resin Monomers and Components

          • Surface Modifiers

        • Post-CMP Cleaning Solutions

          • Semiconductor Cleaning Solutions

            • PlanarClean® Cleaning Solutions

            • ESC Cleaning Solutions

          • Wide Band Gap Semiconductor Cleaning Solutions

          • HDD Media Substrate Cleaning Solutions

        • Post Etch Cleaning Solutions

          • TitanKlean® Cleaning Solutions

          • ST Cleaning Solutions

          • NOE Etchant Cleaning Solutions

        • Precursors

          • Upstream ALD/CVD Precursors

          • Advanced Deposition Materials (ADM) ALD/CVD Precursors

        • Slurries

        • Silanes

        • Organophosphorus Compounds

        • Specialty Acrylates and Methacrylates

        • Siloxanes

        • Specialty Additives

        • Ligands

        • Wafer Reclaim

    • Device Trays

      • Tray Wizard

      • H20 Series Accessories

      • H44 Series Accessories

    • Fluid Management Systems

      • Fittings Selection Tool

      • Liquid Packaging

        • Chemical and Bioprocessing Containers

          • FluoroPure® HDPE Blowmolded Drums

            • FluoroPure® Advantage Trilayer HDPE Blowmolded Drums

            • FluoroPure® Trilayer HDPE Blowmolded Drums

          • FluoroPure® Composite Drums

          • FluoroPure® Custom Products

        • Single-Use Assemblies

          • 2D and 3D Bags

          • Mixing Systems

          • Motion Bioreactor Bags

          • Microcarrier and Cell Separation Systems

          • Secondary Containment

        • NOWPak® Liner Based Systems

        • Sentry® Quick Connect Systems

        • FluoroPure® Intermediate Bulk Containers

        • FluoroPure® Port Options, Tools and Accessories

        • Tube Sets and Manifolds

        • Custom Dip Tubes

        • FluoroPure® Pressure Vessels

        • Process Tanks

      • Valves Selection Tool

      • Fluid Handling

        • Fittings

          • PrimeLock® Tube Fittings

          • PrimeLock® ESD Tube Fittings

          • PrimeLock® Accessories

          • Flaretek® Tube Fittings

          • Flaretek® Accessories

          • Cynergy® Fittings

          • Cynergy® Accessories

          • EP PFA Flare Fittings

          • EP PFA Flare Fitting Accessories

          • PureBond® Welded Tube Fittings

          • Quikgrip® Tube Fittings

          • Quikgrip® PFA Nuts

          • Integral Ferrule Tube Fittings

          • Integral Ferrule Accessories

          • Barb PFA Tube Fittings

          • Dual Containment Fittings

          • PureBond® Welded Pipe Fittings

          • PureBond® Accessories

          • NPT Pipe Fittings

          • NPT Accessories

        • Valves

          • CR and CH Series Valves

            • CR4 Series Valves

            • CR8 Series Valves

            • CH8 Series High-Temperature Valves

            • CRE4 Series Valves

            • CRE8 Series Valves

          • Integra® Valves

          • EP PFA Valves

          • Manifolds and Assemblies

          • Plug Valves

          • Needle/Metering Valves

          • Stopcock Valves

          • Check Valves

          • Valve Accessories

          • Integra® Plus WS ESD Valves

        • Fluid Handling Accessories

          • Spray Products

          • Aspirators

          • Fasteners

        • Valves Selection Tool

        • Fittings Selection Tool

        • Tubing and Pipe

        • Custom Products

      • Process Monitoring

        • Process Control

          • Integrated Flow Controllers

          • NT™ Proportional Control Valves

          • Photochemical Dispense Pumps

        • Process Measurement

          • Concentration Monitors

          • Electronic Flowmeters

          • NT™ Pressure Transducers

        • Particle Characterization

    • Gas Filtration and Purification

      • Gas Diffusers

        • Chambergard™ Gas Diffusers

      • Gas Filters

        • Other Gas Filters

        • In-Line PTFE Gas Filters

        • In-Line Stainless Steel Gas Filters

        • In-Line Nickel Gas Filters

        • Surface Mount Gas Filters

      • AMC Filters

        • Stepper and Scanner Filters

        • Process Tool Air Filters

        • Facility Filtration

        • Filter Housings and Stand-alone Filter Cabinets

      • Gas Purifiers

    • Hard Disk Component Handling

      • Storage Boxes and Individual Disk Packages

      • Read-Write Trays and Carriers

      • Disk Shippers

      • Disk Process Carriers

    • Liquid Filtration and Purification

      • Liquid Filters

      • Liquid Purifiers

      • Liquid Filter Housings

    • Mask and Reticle Handling

      • Reticle Pods and Purge Cabinets

      • Mask Carriers and Shipping Boxes

      • Mask Packages

    • Other Substrate Handling

      • Miscellaneous Device Processing

      • Solar Cell Solutions

    • Specialty Gases

      • Specialty Gas Mixtures

      • Gas Delivery Cylinder Systems

      • Gas Delivery Cabinet Systems

      • Gases

    • Specialty Materials

      • Premium Graphite

        • Industrial Graphite Grades

        • Semiconductor Graphite Grades

        • Life Sciences Graphite Grades

        • Premium Graphite Components

        • Glass Forming Graphite Grades

        • GLASSMATE® Components

        • Graphite Processing Options

        • Aerospace Components

      • Coatings

        • Chucks

        • Plasma Enhanced Chemical Vapor Deposition (PECVD) Coatings

        • Caerus™ Coating Technology

        • Pegasus™ Coating Technology

      • Premium Silicon Carbide

        • SUPERSiC<sup>®</sup> Silicon Carbide Components

        • SUPERSiC<sup>®</sup> Silicon Carbide

      • Advanced Cleaning Materials

    • Wafer Handling

      • Wafer Processing

        • CMP Cleaning Brushes

        • CMP Pads

        • 300 mm Front Opening Unified Pods (FOUPs)

        • 200 mm Wafer Processing

        • 200 mm Accessories

        • 150 mm Wafer Processing

        • 150 mm and Smaller Wafer Carrier Accessories

        • 125 mm Wafer Processing

        • 100 mm Wafer Processing

        • 76.2 mm 3" Wafer Processing

        • 2.5" and Smaller Wafer Processing

        • Labware

        • Chucks

      • Wafer Shipping

        • 300 mm Wafer Shippers

        • 200 mm Wafer Shippers

        • 150 mm Wafer Shippers

        • 125 mm Wafer Shippers

        • 100 mm Wafer Shippers

        • 76.2 mm (3") Wafer Shippers

        • 2.5" and Smaller Wafer Shippers

      • Finished Wafer Shipping

        • SmartStack® Contactless Horizontal Wafer Shipper

        • SmartStack® Horizontal Wafer Shippers

        • Film Frame Rings and Shippers

  • resources resources Resources

    • Reference Materials

    • Technical Information

      • Calculators and Tools

      • Chemical Compatibility

      • Chemlock® Filter Housing Technical Information

      • Component Technical Information

      • Entegris Test Standards and Protocols

      • FAQ

      • Formulas

      • Glossary

      • Material Properties and Safety

      • Particle Characterization Applications

    • Industry Insights

      • 3D NAND Solutions

      • Accelerating Speed-to-Yield with High-Purity Materials Solutions

      • Achieving Hydrogen Purity Standards for Fuel Cells

      • Advanced Coatings

      • Advanced Deposition Materials Innovation

      • Automotive Reliability

      • Cars and Chips: The Acceleration of Electronic Systems

      • Chasing the Perfect Pattern

      • Chemical Mechanical Planarization (CMP)

      • Clean Chemical Delivery

      • Clean Gas Delivery

      • CMP Process Monitoring

      • Cold Chain Bioprocessing

      • Dual Containment Tubing

      • Electrostatic Discharge (ESD) Prevention

      • Enabling Advanced Lithography

      • End-to-End Gas Filtration Solutions

      • Food and Beverage Contamination Control

      • Front-end to Back-end Solutions

      • Glass in Front; Glass in Back

      • High-Density Cell Banking

      • High Purity Chemical Manufacturing

      • Holistic Approach to Enabling Device Performance, Yield, and Reliability

      • Low-Temperature Bioprocessing

      • More Than Just a Chip Tray

      • Operational Excellence

      • Pandemic Response

      • Particle Characterization

      • Pervasive Defectivity in Semiconductor Manufacturing

      • Protecting Your Data Center Environment from Gas-Phase Contamination

      • Silicon Carbide Substrate Solutions

      • Solid Precursors and Delivery Systems

      • Solving Advanced Technology Challenges with Innovative Materials

      • Specialty Gases and Delivery Systems for Ion Implantation

      • Storage Class Memory

      • Targeted Contaminant Removal

      • The Rare Air of the Semiconductor Fab

      • The Silicon Precursor Toolbox for Low-Temperature Deposition

    • Ensights (Blog)

    • Scientific Report

  • about us about us About Us

    • Corporate Overview

    • Corporate Social Responsibility

    • Careers

    • Events

    • Investor Relations

    • Legal/Trademark Notices

    • Locations

    • News Releases

    • Entegris Blog

    • Manufacturing

Our Sites Our Sites Our Sites
more more More

Gases

The right gas the right way

You need the right gas at the right time in the right package, and we can help. When it comes to gas and gas delivery, go with the experts for your Arsine, Phosphine, Boron Trifluoride and Germanium Tetrafluoride needs.

Narrow Your Selection
  • Chemical Formula
  • Cylinder Volume
  • System Type
  • Industry
  • Process
Arsine
Arsine
Arsine
The right gas the right way
Chemical Formula
  • AsH3
 Cylinder Volume
  • 0.44 L
  • 2.2 L
  • 2.5 L
  • 6.6 L
  • 7.6 L
  • 17 L
  • 50 L
 System Type
  • Subatmospheric storage and delivery (SAGS type I)
 Industry
  • Semiconductor
  • Flat Panel Display
  • Solar
Phosphine
Phosphine
Phosphine
Dangerous gases demand the safest technology
Chemical Formula
  • PH3
 Cylinder Volume
  • 0.44 L
  • 2.2 L
  • 2.5 L
  • 6.6 L
  • 7.6 L
  • 16 L
 System Type
  • Subatmospheric storage and delivery (SAGS type I)
 Industry
  • Semiconductor
  • Flat Panel Display
  • Solar
Boron Trifluoride
Boron Trifluoride
Boron Trifluoride
A purely natural performer in the safest way
Chemical Formula
  • BF3
 Cylinder Volume
  • 2.2 L
  • 2.5 L
  • 6.6 L
  • 7.6 L
  • 50 L
 System Type
  • Subatmospheric storage and delivery (SAGS type I)
  • Subatmospheric delivery (SAGS type II)
 Industry
  • Semiconductor
  • Flat Panel Display
Enriched Boron Trifluoride
Enriched Boron Trifluoride
Enriched Boron Trifluoride
Enrich your process, your safety and your purity
Chemical Formula
  • Enriched BF3
 Cylinder Volume
  • 0.44 L
  • 2.2 L
  • 2.5 L
  • 6.6 L
  • 7.6 L
  • 50 L
 System Type
  • Subatmospheric storage and delivery (SAGS type I)
  • Subatmospheric delivery (SAGS type II)
  • Positive pressure delivery @100 psig
 Industry
  • Semiconductor
Enriched 72 Germanium Tetrafluoride
Enriched 72 Germanium Tetrafluoride
Enriched 72 Germanium Tetrafluoride
Reduce your risk and increase effectiveness
Chemical Formula
  • Enriched 72GeF4
 Cylinder Volume
  • 0.44 L
  • 2.2 L
 System Type
  • Subatmospheric storage and delivery (SAGS type I)
  • Subatmospheric delivery (SAGS type II)
 Industry
  • Semiconductor
Enriched Plus 72 Germanium Tetrafluoride
Enriched Plus 72 Germanium Tetrafluoride
Enriched Plus 72 Germanium Tetrafluoride
Tailor your process and increase your throughput
Chemical Formula
  • EnrichedPlus 72GeF4
 Cylinder Volume
  • 0.44 L
  • 2.2 L
 System Type
  • Subatmospheric delivery (SAGS type II)
 Industry
  • Semiconductor
Related Product Categories
Specialty Gas Mixtures

As experts in applied process gas, we are always working to increase your efficiency, safety and performance in gas applications. Creating gas blends in customized proportions is yet another way we can support your needs.
Gas Delivery Cylinder Systems

We provide a variety of gas packages to fit a wide range of needs. From semiconductor applications to solar processes to flat panel display manufacturing, we have the right gas in the right package and delivery source for you.
Gas Delivery Cabinet Systems

Entegris high-purity gas cabinet systems have been designed to deliver a full range of processed toxic gases subatmospherically, eliminating the risk of catastrophic gas release and ensuring a safer work environment.
If you'd like to add this item to compare, please uncheck one of the other 4 items. If you'd like to add this item to compare, please uncheck one of the other 2 items.
-->