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Gases

The right gas the right way

You need the right gas at the right time in the right package, and we can help. When it comes to gas and gas delivery, go with the experts for your Arsine, Phosphine, Boron Trifluoride and Germanium Tetrafluoride needs.

Narrow Your Selection
  • Chemical Formula
  • Cylinder Volume
  • System Type
  • Industry
  • Process
Arsine
Arsine
Arsine
The right gas the right way
Chemical Formula
  • AsH3
 Cylinder Volume
  • 0.44 L
  • 2.2 L
  • 2.5 L
  • 6.6 L
  • 7.6 L
  • 17 L
  • 50 L
 System Type
  • Subatmospheric storage and delivery (SAGS type I)
 Industry
  • Semiconductor
  • Flat Panel Display
  • Solar
Phosphine
Phosphine
Phosphine
Dangerous gases demand the safest technology
Chemical Formula
  • PH3
 Cylinder Volume
  • 0.44 L
  • 2.2 L
  • 2.5 L
  • 6.6 L
  • 7.6 L
  • 16 L
 System Type
  • Subatmospheric storage and delivery (SAGS type I)
 Industry
  • Semiconductor
  • Flat Panel Display
  • Solar
Boron Trifluoride
Boron Trifluoride
Boron Trifluoride
A purely natural performer in the safest way
Chemical Formula
  • BF3
 Cylinder Volume
  • 2.2 L
  • 2.5 L
  • 6.6 L
  • 7.6 L
  • 50 L
 System Type
  • Subatmospheric storage and delivery (SAGS type I)
  • Subatmospheric delivery (SAGS type II)
 Industry
  • Semiconductor
  • Flat Panel Display
Enriched Boron Trifluoride
Enriched Boron Trifluoride
Enriched Boron Trifluoride
Enrich your process, your safety and your purity
Chemical Formula
  • Enriched BF3
 Cylinder Volume
  • 0.44 L
  • 2.2 L
  • 2.5 L
  • 6.6 L
  • 7.6 L
  • 50 L
 System Type
  • Subatmospheric storage and delivery (SAGS type I)
  • Subatmospheric delivery (SAGS type II)
  • Positive pressure delivery @100 psig
 Industry
  • Semiconductor
Enriched 72 Germanium Tetrafluoride
Enriched 72 Germanium Tetrafluoride
Enriched 72 Germanium Tetrafluoride
Reduce your risk and increase effectiveness
Chemical Formula
  • Enriched 72GeF4
 Cylinder Volume
  • 0.44 L
  • 2.2 L
 System Type
  • Subatmospheric storage and delivery (SAGS type I)
  • Subatmospheric delivery (SAGS type II)
 Industry
  • Semiconductor
Enriched Plus 72 Germanium Tetrafluoride
Enriched Plus 72 Germanium Tetrafluoride
Enriched Plus 72 Germanium Tetrafluoride
Tailor your process and increase your throughput
Chemical Formula
  • EnrichedPlus 72GeF4
 Cylinder Volume
  • 0.44 L
  • 2.2 L
 System Type
  • Subatmospheric delivery (SAGS type II)
 Industry
  • Semiconductor
Phosphorus Trifluoride (PF₃)
Phosphorus Trifluoride (PF₃)
Phosphorus Trifluoride (PF₃)
An ultra-pure precursor gas used for cryo etch, chemical vapor deposition and ion implantation applications.
Chemical Formula
  • PF₃
 Cylinder Volume
  • 0.44 L (SDS2)
  • 50L (PDS+100)
  • 2.5L (SDS3)
  • 2.2 L (SDS2)
 System Type
  • Sub atmospheric storage and delivery (SAGS type I)
  • Positive pressure delivery @100 psig
 Industry
  • Semiconductor
Related Product Categories
Specialty Gas Mixtures

As experts in applied process gas, we are always working to increase your efficiency, safety and performance in gas applications. Creating gas blends in customized proportions is yet another way we can support your needs.
Gas Delivery Cylinder Systems

We provide a variety of gas packages to fit a wide range of needs. From semiconductor applications to solar processes to flat panel display manufacturing, we have the right gas in the right package and delivery source for you.
Gas Delivery Cabinet Systems

Entegris high-purity gas cabinet systems have been designed to deliver a full range of processed toxic gases subatmospherically, eliminating the risk of catastrophic gas release and ensuring a safer work environment.
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