SilicoMax™ Coating
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- EUV optical components
- Semiconductor chamber components
Specifications
Substrate: | Compatibility: Most metals and ceramics |
Size: Up to 91 cm (36”) | |
Geometry: Any shape, including complex geometries | |
Structure: | Amorphous |
Temperature: | Deposition: <150°C (302°F) |
Use: 650°C (1202°F) | |
Coating thickness: | A few nm to over 60 μm |
Electrical resistivity: | ˜108 Ω-cm |
Hardness: | 1600 DPHN |
Purity: | 99.95% |
Wear resistance: | Very good |
Oxidation/corrosion resistance: | High-temperature oxidation resistance in air up to 650°C (1202°F) |
Excellent aqueous corrosion resistance including acids and alkalis |
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