Plasma Enhanced Chemical Vapor Deposition (PECVD) Coatings


Featured Resource

PECVD and PVD Coatings
Narrow Your Selection
  • Coating Thickness
  • Corrosion Resistance
  • Electrical Resistivity
  • Hardness
  • Structure
  • Substrate Compatibility
  • Temperature - Use
  • Industry
  • Process
Find OxiMax™ ultrapure, transparent silicon oxide coating at Entegris. Industry-leading PECVD coating technology solutions.
Coating Thickness
  • A few nm to over 100 µm
Corrosion Resistance
  • Aqueous including acids and alkalis
Electrical Resistivity
  • ~1013 Ω-cm
Hardness
  • 800 HV
Find SilicoMax™ ultrapure silicon carbide coating at Entegris. Industry-leading PECVD coating technology solutions.
Coating Thickness
  • A few nm to over 60 µm
Corrosion Resistance
  • Aqueous including acids and alkalis
Electrical Resistivity
  • ~108 Ω-cm
Hardness
  • 1600 HV
Find TranSiMax™ hard silicon nitride coating at Entegris. Industry-leading PECVD coating technology solutions.
Coating Thickness
  • A few nm to over 100 µm
Corrosion Resistance
  • Aqueous
Electrical Resistivity
  • ~1013 Ω-cm
Hardness
  • 1200 HV
Find UltraC™-HT, an exceptionally tough diamond-like carbon (DLC) coating at Entegris. Industry-leading PECVD coating technology solutions.
Coating Thickness
  • 1 - 50 µm
Corrosion Resistance
  • Most acids and alkalis
  • Acid fluxes and solders
Electrical Resistivity
  • ~108 Ω-cm
Hardness
  • 2040 - 2650 HV (20-26 GPa)
Find UltraC™ Diamond, an ultra-hard diamond-like carbon (DLC) coating at Entegris. Industry-leading PECVD coating technology solutions.
Coating Thickness
  • 1 - 10 µm
Corrosion Resistance
  • Most acids and alkalis
Electrical Resistivity
  • 105 - 107 Ω-cm
Hardness
  • 2450 - 2855 HV (24-28 GPa)
Find UltraC™ -L, a lubricious and low surface energy diamond-like carbon coating at Entegris. Industry-leading PECVD Coating Technology solutions.
Coating Thickness
  • 1 - 10 µm
Corrosion Resistance
  • Most acids and alkalis
Electrical Resistivity
  • 105 - 107 Ω-cm
Hardness
  • 1835 - 2245 HV (18-22 GPa)
Find Ultrapure Silicon, a 99.9995% pure silicon coating for contamination control, at Entegris. Industry-leading PECVD coating technology solutions.
Coating Thickness
  • A few nm to over 150 µm
Corrosion Resistance
  • Aqueous including acids and alkalis
Electrical Resistivity
  • 108 - 109 Ω-cm
Hardness
  • 2453 - 2855 HV (24-28 GPa)
If you'd like to add this item to compare, please uncheck one of the other 4 items. If you'd like to add this item to compare, please uncheck one of the other 2 items.