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Recently Published

Jun. 1, 2015

SUPERSiC® Silicon Carbide Materials
Narrow Your Selection
  • Industry
  • Process
Silicon carbide wafer carrier solutions that fit all horizontal furnace systems. See benefits.
Industry
  • Semiconductor
  • Solar/PV
Process
  • Deposition
Premium silicon carbide dummy wafers that can be cleaned and reused indefinitely. See benefits.
Industry
  • Semiconductor
  • Solar/PV
Process
  • Deposition
SUPERSiC® Silicon Carbide wafer and wafer carrier solutions that fit all horizontal furnace systems. See benefits.
Industry
  • Semiconductor
  • Solar/PV
Process
  • Deposition
SUPERSiC silicon carbide 4" satellite disk solutions for process stability, extreme robustness and customization for each unique recipe for application.
Industry
  • LED
Process
  • Deposition
Etch chamber components such as edge rings, confinement rings and focus rings manufactured using SUPERSiC silicon carbide will improve the process performance in dry etch applications.
Industry
  • Semiconductor
Process
  • Etch
SUPERSiC® silicon carbide 2" satellite disk solutions for process stability, extreme robustness and customization for each unique recipe for application.
Industry
  • LED
Process
  • Deposition
High efficiency simple and complex mechanical shapes from thermally stable SUPERSiC
Industry
  • Aerospace
Process
  • Optical Systems
Entegris scan mirrors are some of the highest performing mirrors available from any material
Industry
  • Aerospace
Process
  • Optical Systems
Thermally insensitive full silicon carbide assemblies for space, airborne, or ground applications
Industry
  • Aerospace
Process
  • Optical Systems
Optimized beamline components in specific grades of graphite and/or silicon carbide that match the requirements of specific beamline areas
Industry
  • Semiconductor
Process
  • Implant
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