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SUPERSiC® Silicon Carbide Components

Custom and standard products

Near net parts are machined in graphite, purified and subjected to a proprietary conversion process which substitutes pure silicon atoms for carbon atoms. The result is SUPERSIC®, our high-purity silicon carbide. 

Narrow Your Selection
  • Industry
  • Process
Horizontal Carriers
Horizontal Carriers
Horizontal Carriers
Silicon carbide wafer carrier solutions that fit all horizontal furnace systems. See benefits.
Industry
  • Semiconductor
  • Solar/PV
 Process
  • Deposition
Dummy Wafers
Dummy Wafers
Dummy Wafers
Premium silicon carbide dummy wafers that can be cleaned and reused indefinitely. See benefits.
Industry
  • Semiconductor
  • Solar/PV
 Process
  • Deposition
Baffle Carriers and Wafers
Baffle Carriers and Wafers
Baffle Carriers and Wafers
SUPERSiC® Silicon Carbide wafer and wafer carrier solutions that fit all horizontal furnace systems. See benefits.
Industry
  • Semiconductor
  • Solar/PV
 Process
  • Deposition
4" Satellite Disk
4" Satellite Disk
4" Satellite Disk
SUPERSiC silicon carbide 4" satellite disk solutions for process stability, extreme robustness and customization for each unique recipe for application.
Industry
  • LED
 Process
  • Deposition
2" Disks
2" Disks
2" Disks
SUPERSiC® silicon carbide 2" satellite disk solutions for process stability, extreme robustness and customization for each unique recipe for application.
Industry
  • LED
 Process
  • Deposition
Optical Benches
Optical Benches
Optical Benches
High efficiency simple and complex mechanical shapes from thermally stable SUPERSiC
Industry
  • Aerospace
 Process
  • Optical Systems
Scan Mirrors
Scan Mirrors
Scan Mirrors
Entegris scan mirrors are some of the highest performing mirrors available from any material
Industry
  • Aerospace
 Process
  • Optical Systems
Telescopes - Structures and Mirrors
Telescopes - Structures and Mirrors
Telescopes - Structures and Mirrors
Thermally insensitive full silicon carbide assemblies for space, airborne, or ground applications
Industry
  • Aerospace
 Process
  • Optical Systems
Ion Implant Beam
Ion Implant Beam
Ion Implant Beam
Optimized beamline components in specific grades of graphite and/or silicon carbide that match the requirements of specific beamline areas
Industry
  • Semiconductor
 Process
  • Implant
Mirrors and Mirror Substrates
Mirrors and Mirror Substrates
Mirrors and Mirror Substrates
Very low thermal sensitivity, high strength, and shape versatility due to the chemical vapor conversion manufacturing method
Industry
  • Aerospace
 Process
  • Optical Systems
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SUPERSiC® Silicon Carbide

Our unique conversion process produces the highest quality silicon carbide products available on the market today. We offer a range of SUPERSiC® options to meet your demanding requirements. 
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