Electrostatic Chucks
Contact your Entegris account manager or
- Ion implant
- Semiconductor single-wafer processing tools
- Electrostatic chuck refurbishment
- Electrostatic chuck coating service
Specifications
Size | 100 – 450 mm |
Electrostatic Type | Coulombic |
Electrical Configuration | AC, DC |
Electrode Type | Mono-polar, Bi-polar, Multi-polar |
Dielectric Material | High-Purity Alumina, Proprietary Coatings |
Wafer Contact Surface Material | Si-based, Carbon-based, Pegasus, Caerus, Polymer-based, Hybrid |
Wafer Contact Surface | Custom embossed Pattern, compliant or hard |
Use Temperature | -100 to 550°C |
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