CR4 Series Pneumatic Valves, 1/4" Orifice, 2-way, Normally Open Luer
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- Not all configurations are permitted. Consult Entegris if multiple special order features are required.
- Contact factory if “SpaceSaver” port connections are to be used in media containing a fluorinated surfactant.
- Pillar nuts, inserts and gauge rings included as standard.
- P2 = Pilot port rotated 90° clockwise
- P3 = Pilot port rotated 180° clockwise (over Port 2)
- P4 = Pilot port rotated 270° clockwise
- High-purity corrosive chemical handling
- All semiconductor wet etch and clean (WEC) process chemicals
- Chemical line sizes 3/8" or smaller
Specifications
Durable Valves for Harsh Environments
- With no exposed metal hardware, the CR4 Series valve is completely sealed and protected from harsh chemical environments
- The modular design enables manifold customization into your fluid delivery system
- Designed with the same footprint as our stand-alone and manifold Galtek® SG Series valves and Dymension® valve manifolds, allowing for easy retrofits or replacement
| Dimensions | ||||
| Port Connection | Flow Factor CV | Flow Factor KV | A | B |
| 1/4" Flaretek | 0.29 | 4.2 | 3.36" (85.3 mm) | 0.51" (13.0 mm) |
| 1/4" FNPT | 0.84 | 12.0 | 2.75" (69.8 mm) | 0.51" (13.0 mm) |
| 1/4" Super 300 Type Pillar fitting | 0.29 | 4.2 | 2.57" (65.3 mm) | 0.51" (13.0 mm) |
| 1/4" PrimeLock | 0.34 | 4.9 | 3.18" (80.8 mm) | 0.51" (13.0 mm) |
| 1/4" PureBond | 0.84 | 12.0 | 2.68" (68.1 mm) | 0.51" (13.0 mm) |
| 3/8" Flaretek | 0.84 | 12.0 | 3.50" (88.9 mm) | 0.51" (13.0 mm) |
| 3/8" Super 300 Type Pillar fitting | 0.84 | 12.0 | 2.88" (73.2 mm) | 0.51" (13.0 mm) |
| 3/8" PrimeLock | 0.84 | 12.0 | 3.18" (80.8 mm) | 0.61" (15.5 mm) |
Restricted Open or Restricted Closed (shown in 5th drawing above)
Note: Height dimension includes stem in open position
- Restricted open option allows for a manual variable limit control on the open travel of a pneumatically controlled valve
- Restricted closed option allows for a manual variable limit control on the closed travel of a pneumatically controlled valve
- Both options are offered in normally closed and normally open pneumatic actuators
Sensing Option Dimensional Information (shown in 6th drawing above)
A Remote Position Indication option is available to monitor valve open and closed positions electronically.
Note: To enable the remote position indication option you must special order the Omron® sensor (-OM) on the valve. In addition, order Omron position sensor indicator (EE-SX771R or EE-SX771A), which are sold separately.
| Materials | |||
| All wetted parts | PFA | ||
| Exterior actuator parts | PVDF, Viton® | ||
| Interior actuator parts | PVDF, SST, Viton | ||
| Mounting base | PVDF | ||
| Operating Conditions | |||
| Media pressure at | 21°C (70°F) | Inlet - 913 mbar (27" Hg) vacuum to 552 kPa (80 psig)1 | |
| Outlet - 913 mbar (27" Hg) vacuum to 276 kPa (40 psig) | |||
| 160°C (320°F) | Inlet - 276 kPa (40 psig)1 | ||
| Outlet - 138 kPa (20 psig)1 | |||
| Actuation pressure | 345-552 kPa (50-80 psig)1 | ||
| Temperature range | |||
| Ambient | 23°C - 50°C (73°F - 122°F), ambient | ||
| Fluid | 21°C - 160°C (70°F - 320°F), fluid1 | ||
| Pneumatic supply port | 1/4" molded female Luer lug style | ||
| Compliant | RoHs & WEE | ||
1Actual valve performance varies with pressure and temperature; refer to actual ratings in performance data.
Successfully Opted for software Updates
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01-003444
Mounting base for use with all 1/4" 2-way CR4 Series and SG Series valves
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CR4-2UL-RKIT
Repair kit for 1/4" 2-way CR4 Series pneumatic, normally open, Luer valves
- Not all configurations are permitted. Consult Entegris if multiple special order features are required.
- Contact factory if “SpaceSaver” port connections are to be used in media containing a fluorinated surfactant.
- Pillar nuts, inserts and gauge rings included as standard.
- P2 = Pilot port rotated 90° clockwise
- P3 = Pilot port rotated 180° clockwise (over Port 2)
- P4 = Pilot port rotated 270° clockwise