CR4 Series Pneumatic Valves, 2-way, Top Mount, FNPT
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- High-purity corrosive chemical handling
- All semiconductor wet etch and clean (WEC) process chemicals
- Chemical line sizes 3/8" or smaller
Specifications
Durable Valves for Harsh Environments
- With no exposed metal hardware, the CR4 Series valve is completely sealed and protected from harsh chemical environments
- The modular design enables manifold customization into your fluid delivery system
- Designed with the same footprint as our stand-alone and manifold Galtek® SG Series valves and Dymension® valve manifolds, allowing for easy retrofits or replacement
| Dimensions | |||
| Port Connection | Flow Factor | A | B |
| 1/4" Flaretek | 0.29 Cv (4.2 Kv) | 3.36" (85.3 mm) | 0.51" (13.0 mm) |
| Materials | All wetted parts | PFA | |
| Exterior actuator parts | PVDF, Viton® | ||
| Interior actuator parts | PVDF, SST, Viton | ||
| Mounting base | PVDF | ||
| Operating conditions* | Media pressure at | 21°C (70°F) | Inlet - 913 mbar (27" Hg) vacuum to 552 kPa (80 psig)* |
| Outlet - 913 mbar (27" Hg) vacuum to 276 kPa (40 psig)*, ** | |||
| 160°C (320°F) | Inlet - 276 kPa (40 psig) | ||
| Outlet - 138 kPa (20 psig) | |||
| Actuation pressure | 345 - 552 kPa (50-80 psig)* | ||
| Temperature range | Ambient | 23°C - 50°C (73°F - 122°F), ambient | |
| Fluid | 21°C - 160°C (70°F - 320°F), fluid* | ||
| Pneumatic supply port | 1/8" FNPT | ||
| Compliant | RoHs & WEE | ||
| *Actual valve performance varies with pressure and temperature; refer to actual ratings in performance data. **Optional high-pressure outlet versions for up to 552 kPa (80 psig). |
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Successfully Opted for software Updates
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01-003444
Mounting base for use with all 1/4" 2-way CR4 Series and SG Series valves
| Part Number | Actuator | Inlet | Outlet | Options |
|---|---|---|---|---|
| CR4-2CN-4F | Pneumatic normally closed | 1/4" Flaretek® | 1/4" Flaretek® | PVDF Flaretek® nut |