CRE4 Series ESD Pneumatic Valves, 1/4" Orifice, 2-way Normally Closed Tube
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Applications
- Designed for use with flammable solvents and other nonconductive semiconductor chemistries, and corrosive chemicals in semiconductor processing applications.
- High-purity corrosive chemical handling
- All semiconductor wet etch and clean (WEC) process chemicals
- Chemical line sizes 3/8" or smaller
Specifications
Durable Valves for Harsh Environments
- With no exposed metal hardware, the CRE4 Series valve is completely sealed and protected from harsh chemical environments
| Dimensions | ||||
| Port Connection | Flow Factor CV | Flow Factor KV | A | B |
| 1/4" PrimeLock | 0.34 | 4.9 | 3.18" (80.8 mm) | 0.51" (13.0 mm) |
| 3/8" PrimeLock | 0.84 | 12.0 | 3.18" (80.8 mm) | 0.61" (15.5 mm) |
| Materials | All wetted parts | PFA, Conductive PFA | |
| Exterior actuator parts | PVDF, Viton® | ||
| Interior actuator parts | PVDF, SST, Viton | ||
| Mounting base | PVDF | ||
| Operating Conditions1 | Media pressure at | 21°C (70°F) | Inlet - 913 mbar (27" Hg) vacuum to 552 kPa (80 psig)1 |
| Outlet - 913 mbar (27" Hg) vacuum to 276 kPa (40 psig)1 | |||
| 100°C (212°F) | Inlet - 414 kPa (60 psig) | ||
| Outlet - 207 kPa (30 psig) | |||
| Actuation pressure | 345-552 kPa (50-80 psig)1 | ||
| Temperature range | Ambient | 23°C - 50°C (73°F - 122°F), ambient | |
| Fluid | 21°C - 100°C (70°F - 212°F), fluid1 | ||
| Pneumatic supply port | 1/4" tube stub | ||
| Compliant | RoHs & WEE | ||
1Actual valve performance varies with pressure and temperature; refer to actual ratings in performance data.
Successfully Opted for software Updates
Published Jul 31, 2018
Instruction Sheet
CR4 Discrete Valve and Manifold Valve Repair or Replacement Procedure
1.2 MB
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01-003444
Mounting base for use with all 1/4" 2-way CR4 Series and SG Series valves
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CR4-2CT-RKIT
Repair kit for 1/4" 2-way CR4 Series pneumatic, normally closed, tube valves
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GS-CRE4
Grounding straps for CRE4 ESD Valves
| Part Number | Inlet | Outlet |
|---|---|---|
| CRE4-2C-4KK | 1/4" PrimeLock® | 1/4" PrimeLock® |
| CRE4-2C-6KK | 3/8" PrimeLock® | 3/8" PrimeLock® |