EP PFA Manual TS Sampling Valves
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- Bulk chemical delivery in the semiconductor and flat panel display markets
- High-purity, corrosive chemical handling within the semiconductor and flat panel display markets
Specifications
Leg 1 (X) | Leg 2 (Sample Y) |
Leg 3 (Z) | Flow factor | A | B | C | D | E |
1/2" | 1/2" | 1/2" | 1.1-1.3 Cv | 38.0 mm (1.49") | 72.3 mm (2.85") | 201.0 mm (7.91") | 72.0 mm (2.83") | 122.0 mm (4.80") |
3/4" | 1/2" | 3/4" | 1.1-1.3 Cv | 38.0 mm (1.49") | 72.3 mm (2.85") | 201.0 mm (7.91") | 72.0 mm (2.83") | 128.0 mm (5.04") |
3/4" | 3/4" | 3/4" | 3.8-4.2 Cv | 38.0 mm (1.49") | 72.3 mm (2.85") | 201.0 mm (7.91") | 70.2 mm (2.76") | 128.0 mm (5.04") |
1" | 1/2" | 1" | 1.1-1.3 Cv | 38.0 mm (1.49") | 72.3 mm (2.85") | 201.0 mm (7.91") | 72.0 mm (2.83") | 152.0 mm (5.98") |
1" | 3/4" | 1" | 3.8-4.2 Cv | 38.0 mm (1.49") | 72.3 mm (2.85") | 201.0 mm (7.91") | 70.2 mm (2.76") | 152.0 mm (5.98") |
1" | 1" | 1" | 6-7 Cv | 38.0 mm (1.49") | 70.3 mm (2.77") | 203.3 mm (8.00") | 80.0 mm (3.15") | 152.0 mm (5.98") |
1 1/2" | 1/2" | 1 1/2" | 1.1-1.3 Cv | 52.3 mm (2.06") | 89.7 mm (3.53") | 232.6 mm (9.16") | 72.0 mm (2.83") | 228.0 mm (9.00") |
1 1/2" | 3/4" | 1 1/2" | 3.8-4.2 Cv | 52.3 mm (2.06") | 89.7 mm (3.53") | 232.6 mm (9.16") | 70.2 mm (2.76") | 228.0 mm (9.00") |
1 1/2" | 1" | 1 1/2" | 6-7 Cv | 52.3 mm (2.06") | 87.7 mm (3.45") | 234.9 mm (9.25") | 80.0 mm (3.15") | 228.0 mm (9.00") |
1 1/2" | 1 1/2" | 1 1/2" | 17-23 Cv | 52.3 mm (2.06") | 117.8 mm (4.64") | 312.2 mm (12.29") | 117.5 mm (4.63") | 228.0 mm (9.00") |
Materials | All wetted parts | PFA, PTFE | |
Nonwetted parts | Viton®, PVDF, PP, PC, Stainless steel 304 | ||
Pressure range | 695 kPa (100 psig) @ 21°C (70°F) fluid temperature | ||
441 kPa (64 psig) @ 90°C (194°F) fluid temperature | |||
Temperature range | 21° to 90°C (70° to 194°F) |
Successfully Opted for software Updates
Part Number | Ports 1 & 3 Connection | Sample Port Connection | For Use in NH4OH Applications |
---|---|---|---|
PLTSMV-F08-08-08 | 1/2" EP PFA Flare | 1/2" EP PFA Flare | No |
PLTSMV-F08-08-08-H | 1/2" EP PFA Flare | 1/2" EP PFA Flare | Yes |
PLTSMV-F12-08-12 | 3/4" EP PFA Flare | 1/2" EP PFA Flare | No |
PLTSMV-F12-08-12-H | 3/4" EP PFA Flare | 1/2" EP PFA Flare | Yes |
PLTSMV-F12-12-12 | 3/4" EP PFA Flare | 3/4" EP PFA Flare | No |
PLTSMV-F12-12-12-H | 3/4" EP PFA Flare | 3/4" EP PFA Flare | Yes |
PLTSMV-F16-08-16 | 1" EP PFA Flare | 1/2" EP PFA Flare | No |
PLTSMV-F16-08-16-H | 1" EP PFA Flare | 1/2" EP PFA Flare | Yes |
PLTSMV-F16-12-16-H | 1" EP PFA Flare | 3/4" EP PFA Flare | Yes |
PLTSMV-F16-16-16 | 1" EP PFA Flare | 1" EP PFA Flare | No |
PLTSMV-F16-16-16-H | 1" EP PFA Flare | 1" EP PFA Flare | Yes |
PLTSMV-F24-08-24 | 1 1/2" EP PFA flare | 1/2" EP PFA Flare | No |
PLTSMV-F24-08-24-H | 1 1/2" EP PFA flare | 1/2" EP PFA Flare | Yes |
PLTSMV-F24-12-24 | 1 1/2" EP PFA flare | 3/4" EP PFA Flare | No |
PLTSMV-F24-12-24-H | 1 1/2" EP PFA flare | 3/4" EP PFA Flare | Yes |
PLTSMV-F24-16-24 | 1 1/2" EP PFA flare | 1" EP PFA Flare | No |
PLTSMV-F24-16-24-H | 1 1/2" EP PFA flare | 1" EP PFA Flare | Yes |
PLTSMV-F24-24-24 | 1 1/2" EP PFA flare | 1 1/2" EP PFA flare | No |