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EP PFA Valves

High-purity, corrosion-resistant valves capable of moving large volumes of corrosive chemicals.

We offer a comprehensive line of reliable high-flow, manual and pneumatic valves that meet your needs for large volume chemical delivery. These valves provide chemical resistance in corrosive applications throughout semiconductor, LCD, TFT and flat panel display markets.

VIEW OUR VALVE SELECTION TOOL

Narrow Your Selection
  • Actuator Type
  • Port Connection
  • Port Size
  • Valve Type
  • Industry
  • Process
EP PFA Manual Valves, 1 1/2" and 2", 2-way
EP PFA Manual Valves, 1 1/2" and 2", 2-way
EP PFA Manual Valves, 1 1/2" and 2", 2-way
The unique seat seal and through-bolt construction ensure port-to-port seal integrity, and enable our 1 1/2" and 2" manual diaphragm valves to move large volumes of chemical
Actuator Type
  • Manual multi-turn
 Configuration
  • 2-way
 Port Connection
  • PureBond® pipe
 Port Size
  • 1 1/2"
  • 2"
EP PFA Pneumatic Valves, 1 1/2" and 2", 2-way
EP PFA Pneumatic Valves, 1 1/2" and 2", 2-way
EP PFA Pneumatic Valves, 1 1/2" and 2", 2-way
We offer 1 1/2" and 2" PFA pneumatic 2-way valves for distributing high volumes of high-purity chemical.
Actuator Type
  • Pneumatic normally closed
 Configuration
  • 2-way
 Port Connection
  • PureBond® pipe
  • EP PFA flare
 Port Size
  • 1 1/2"
  • 2"
EP Manual Valves, 2-way, PFA-lined
EP Manual Valves, 2-way, PFA-lined
EP Manual Valves, 2-way, PFA-lined
Manually actuated, PFA-lined stainless steel valves are capable of distributing high volumes of high-purity chemical. A variety of connection sizes, from 1/2" to 2", are available to meet your specific fluid system needs.
Actuator Type
  • Manual multi-turn
 Configuration
  • 2-way
 Port Connection
  • Flange
 Port Size
  • 15A (1/2")
  • 20A (3/4")
  • 25A (1")
  • 40A (1 1/2")
  • 50A (2")
EP Pneumatic Valves, 2-way, PFA-lined
EP Pneumatic Valves, 2-way, PFA-lined
EP Pneumatic Valves, 2-way, PFA-lined
Pneumatically actuated, PFA-lined stainless steel valves are capable of distributing high volumes of high-purity chemical. A variety of connection sizes, from 1/2" to 2", are available to meet your fluid system needs..
Actuator Type
  • Pneumatic normally closed
 Configuration
  • 2-way
 Port Connection
  • Flange
 Port Size
  • 15A (1/2")
  • 20A (3/4")
  • 25A (1")
  • 40A (1 1/2")
  • 50A (2")
EP PFA Manual TS Sampling Valves
EP PFA Manual TS Sampling Valves
EP PFA Manual TS Sampling Valves
These uniquely designed TS sampling valves provide space-saving advantages in a sampling valve configuration. Port sizes range from 1/2" to 1 1/2".
Actuator Type
  • Manual
 Configuration
  • Sampling
 Port Connection
  • EP PFA flare
 Port Size
  • 1/2"
  • 3/4"
  • 1"
  • 1 1/2"
EP PFA PMI Manifold Valves
EP PFA PMI Manifold Valves
EP PFA PMI Manifold Valves
Integrate pneumatic and manual valves into a single valve block to meet your specific fluid system design.
Actuator Type
  • Pneumatic
  • Manual
 Configuration
  • 2-way
 Port Connection
  • EP PFA flare
  • PureBond® pipe
 Port Size
  • 1/2"
  • 3/4"
  • 1"
Related Product Categories
Integra® Valves

High-purity, corrosion-resistant Integra® valves offer reliable performance in high-purity, aggressive chemical applications. With no external metal parts, the valves are safe and will not corrode in harsh environments. 
Solenoid Valves

All wetted parts in our powerful, compact 1/4" solenoid valves are designed for high-purity and corrosive applications. 
Stack Valves

This innovatively designed 3-way valve has the ports located on one plane so they may be easily stacked side by side, significantly reducing footprint in your fluid handling system. 
Plug Valves

We offer Magnaflo® and fast acting Galtek® plug valves that provide durable, corrosion-resistance in aggressive chemical applications. For use in the same applications as traditional ball valves.
Stopcock Valves

We offer reliable stopcock valves for any instrumentation need. 1/8" orifice valves are available in 2-way, 2-way 90° and 3-way configurations.
Check Valves

Corrosion-resistant Galtek® check valves reduce contamination potential in your high-purity chemical applications. An O-ring-free design provides a simple, clean, compact valve with a high flow rate.  
Manifolds and Assemblies

Whether a subassembly or an entire system, Entegris can fabricate your unique product utilizing plastic machining, welding, bonding and/or general fabrication. 
SG Series Valves

Ideal where space is limited, our Galtek® SG Series valves set the standard for small valves with all-PFA wetted surfaces used in CMP and high purity semiconductor fluid handling applications. 
Valve Accessories

Learn about the numerous accessories available that help you secure and maintain Entegris valves used in ultrapure, corrosive fluid applications. 
Cynergy® Valves

Cynergy® valves with beadless weld or industry standard clamp connections are designed for applications involving ultrapure water, water for injection, corrosive chemistries or biotechniques.
Needle/Metering Valves

Our portfolio of Accuflo™ metering and needle valves, and Galtek® needle valves provide reliable options for you to accurately control media flow in corrosive environments.
Integra® Plus WS ESD Valves

The weir-style valve body design streamlines the flow path and eliminates dead volume; ideal in CMP slurry and bulk chemical applications, pneumatic actuation.

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