EP PFA PMI Manifold Valves
Specify Your Part
Part Number:
Interested in an Entegris Product?
To discuss your specific needs, contact your local Entegris representative.
Don't have an Entegris representative?
Contact Us
Request a Quote
Quote Requested
Thank you for requesting a quote. Someone from Entegris will contact you shortly.
Your quote number is {0}.
Top of page
Reference Materials
CAD
CAD drawings may be available for this product. Please use the Part Selector to select a part number to see if they are available.
Applications
- Bulk chemical delivery in the semiconductor and flat panel display markets
- High-purity, corrosive chemical handling within the semiconductor and flat panel display markets
Specifications
| Part Number | A | H | L Dimensions | J Connection | T | ||||||
| L-1 | L-2 | L-3 | L-4 | L-5 | L-6 | J-1 | J-2 | ||||
| PLPMI-MP-P08 | 1.26" (32 mm) | 7.01" (178 mm) | 4.13" (105 mm) | 4.13" (105 mm) | 8.27" (210 mm) | 4.92" (125 mm) | 5.59" (142 mm) | 10.51" (267 mm) | 1/2" Pipe | 1/2" Pipe | 0.20" (5 mm) |
| PLPMI-MP-P12 | 1.26" (32 mm) | 7.01" (178 mm) | 4.13" (105 mm) | 4.13" (105 mm) | 8.27" (210 mm) | 4.92" (125 mm) | 5.59" (142 mm) | 10.51" (267 mm) | 3/4" Pipe | 3/4" Pipe | 0.20" (5 mm) |
| PLPMI-MP-F16 | 1.26" (32 mm) | 7.01" (178 mm) | 4.92" (125 mm) | 4.92" (125.0 mm) | 9.84" (250 mm) | 4.92" (125 mm) | 5.59" (142 mm) | 10.51" (267 mm) | 1" Flare | 1" Flare | 0.20" (5 mm) |
| PLPMI-MP-P12-F16 | 1.26" (32 mm) | 7.01" (178 mm) | 4.13" (105 mm) | 4.92" (125 mm) | 9.06" (230 mm) | 4.92" (125 mm) | 5.59" (142 mm) | 10.51" (267 mm) | 3/4" Pipe | 1" Flare | 0.20" (5 mm) |
| Materials: | Exterior actuator parts | Glass-filled polypropylene | |
| Interior actuator parts | PP, PVDF, Viton®, stainless steel | ||
| Wetted components | PFA, PTFE | ||
| Maximum operating pressure: | 5 kg/cm2 (71 psig) | ||
| Maximum operating temperature: | 65°C (149°F) | ||
| Leakage test pressure: | 8 kg/cm2 (114 psig) | ||
Cv Data by Applied Size
| Port | Size | CV Maximum | Connection Type |
| P08 | 1/2" | 5.5 | Welded pipe |
| P12 | 3/4" | 7.5 | Welded pipe |
| F16 | 1" | 7.5 | PFA flare |
Successfully Opted for software Updates
Part Numbers
| Part Number | Port 1 Connection | Port 2 Connection |
|---|---|---|
| PLPMI-MP-F16 | 1" EP PFA flare | 1" EP PFA flare |
| PLPMI-MP-P08 | 1/2" Welded pipe | 1/2" Welded pipe |
| PLPMI-MP-P12 | 3/4" Welded pipe | 3/4" Welded pipe |
| PLPMI-MP-P12-F16 | 3/4" Welded pipe | 1" Welded pipe |