Integra® Pneumatic Valves, 1/2" Orifice, 2-way, Normally Open
To discuss your specific needs, contact your local Entegris representative.
Don't have an Entegris representative?
Contact UsThank you for requesting a quote. Someone from Entegris will contact you shortly.
Your quote number is {0}.
Ideal in point-of-use applications when low flow is required, including:
- High-purity, corrosive chemical handling
- Wet etch and clean (WEC) process chemicals
- Low volume bulk chemical delivery
- Chemical line sizes 1/2" or larger
Specifications
Dimension Note:
Dimensions are the same regardless of body material (PVDF or ECTFE) or nut material (PVDF, PFA or CPFA).
Port Connection | Flow Factor Cv (Kv) | Dimensions | ||
A | B | C | ||
1/2" Flaretek | 2.0 (28.6) | 4.40" (111.8 mm) | 0.57" (14.5 mm) | 3.72" (94.5 mm) |
1/2" PureBond fusible pipe | 3.0 (42.8) | 5.75" (146.0 mm) | 0.73" (18.5 mm) | 3.89" (98.8 mm) |
1/2" FNPT | 3.0 (42.8) | 2.75" (69.8 mm) | 0.73" (18.5 mm) | 3.89" (98.8 mm) |
3/4" Flaretek | 3.0 (42.8) | 5.27" (133.9 mm) | 0.73" (18.5 mm) | 3.89" (98.8 mm) |
3/4" PureBond fusible pipe | 3.0 (42.8) | 5.75" (146.0 mm) | 0.73" (18.5 mm) | 3.89" (98.8 mm) |
Note: The Inlet Pressure vs. Outlet Pressure as a Function of Media Temperature graph is not applicable for valves with ECTFE external components. For ECTFE temperature ratings refer to the Specification table below.
Pressure range: | 29" Hg vacuum (980 mbar) to 80 psig (551.6 kPa) at 0 outlet pressure. |
Temperature range: | 75° to 150°F (24° to 65°C), ambient 75° to 150°F (24° to 65°C) fluid 75°F (24°C) for ECTFE external components, ambient and fluid |
Pneumatic supply pressure: | 40 psig (275.8 kPa) minimum to 70 psig (482.6 kPa) maximum. |
Pneumatic supply port: | 1/8" FNPT (Normally open valve is piloted through top of valve.) |
Materials: | All wetted parts are PFA. Exterior actuator parts are PVDF or ECTFE. Interior actuator parts are PVDF, stainless steel, Viton®. |
Note: Actual valve performance varies with pressure and temperature. Refer to actual ratings in performance charts.
Successfully Opted for software Updates
-
I8-MB-01
Mounting base for 1/2" 2-way Integra® valves except those with 1/2" Flaretek® or 1/2" Flaretek "SpaceSaver" port connections
-
I8-MB-02
Mounting base for 1/2" 2-way Integra® valves with 1/2" Flaretek® or 1/2" Flaretek "SpaceSaver" port connections
-
202-116
Repair kit for 1/2" Integra® 2-way, pneumatic normally open valves
-
213-103-01
Tool kit for all 1/2" Integra® sampling or 2-way valves except D8 high pressure valves.
-
213-156
Tool - indicator stem trim fixture for all 1/4" or 1/2" Integra® pneumatic valves except 1/2" 2-way or 3-way high pressure (D8) valves.
Part Number | Inlet | Outlet | Options |
---|---|---|---|
202-61-01 | 1/2" FNPT | 1/2" FNPT | N/A |
202-62-01 | 1/2" PureBond® pipe | 1/2" PureBond® pipe | N/A |
202-62-01-EC | 1/2" PureBond® pipe | 1/2" PureBond® pipe | ECTFE actuator |
202-63-01 | 3/4" PureBond® pipe | 3/4" PureBond® pipe | N/A |
202-63-01-EC | 3/4" PureBond® pipe | 3/4" PureBond® pipe | ECTFE actuator |
202-64-01 | 3/4" Flaretek® | 3/4" Flaretek® | PVDF Flaretek® nut |
202-64-01-3 | 3/4" Flaretek® | 3/4" Flaretek® | PFA Flaretek® nut |
202-64-01-EC | 3/4" Flaretek® | 3/4" Flaretek® | ECTFE actuator with PFA nut |
202-64-SI-01-3 | 3/4" Flaretek® "SpaceSaver" | 3/4" Flaretek® | PFA Flaretek® nut |
202-64-SI-01-EC | 3/4" Flaretek® "SpaceSaver" | 3/4" Flaretek® | ECTFE actuator with PFA nut |
202-64-SO-01-3 | 3/4" Flaretek® | 3/4" Flaretek® "SpaceSaver" | PFA Flaretek® nut |
202-64-SO-01-6 | 3/4" Flaretek® | 3/4" Flaretek® "SpaceSaver" | CPFA Flaretek® nut |
202-64-SO-01-EC | 3/4" Flaretek® | 3/4" Flaretek® "SpaceSaver" | ECTFE actuator with PFA nut |
202-67-01 | 1/2" Flaretek® | 1/2" Flaretek® | PVDF Flaretek® nut |
202-67-01-3 | 1/2" Flaretek® | 1/2" Flaretek® | PFA Flaretek® nut |
202-67-01-EC | 1/2" Flaretek® | 1/2" Flaretek® | ECTFE actuator with PFA nut |
202-67-SI-01 | 1/2" Flaretek® "SpaceSaver" | 1/2" Flaretek® | PVDF Flaretek® nut |
202-67-SI-01-3 | 1/2" Flaretek® "SpaceSaver" | 1/2" Flaretek® | PFA Flaretek® nut |
202-67-SI-01-EC | 1/2" Flaretek® "SpaceSaver" | 1/2" Flaretek® | ECTFE actuator with PFA nut |
202-67-SO-01-6 | 1/2" Flaretek® | 1/2" Flaretek® "SpaceSaver" | CPFA Flaretek® nut |
202-67-SO-01-EC | 1/2" Flaretek® | 1/2" Flaretek® "SpaceSaver" | ECTFE actuator with PFA nut |