Entegris is a global leader in contamination control, critical materials handling, and advanced process materials for the semiconductor and other high-tech industries. Entegris is ISO-9001 certified and has manufacturing, customer service and/or research facilities in the United States, China, France, Germany, Israel, Japan, Malaysia, Singapore, South Korea and Taiwan.
Entegris is committed to providing customers the best information possible to ensure optimal product performance. Our resource center provides in-depth product and application information through product data sheets, technical papers, SDSs and more. Be sure to visit the resource center regularly to see updates and new additions.
For 50 years, Entegris has been a provider of critical products and materials used in advanced high-technology manufacturing. These products and materials are often used to make the building blocks of many of the world's most complex microelectronic products, such as computers, mobile devices and phones, data storage components, televisions and monitors, and automobiles.
Insert style, Super Type Pillar® or Flowell™ 60 series
Impact® 8G or Impact 2 V2 (OF style)
Inlet, outlet and vent tubing
6.35 mm (0.25”) or 6.0 mm (0.24”)
3.97 mm (0.15628”) or 4.0 mm (0.16”)
Inlet gas type
Inlet gas pressure
0.26 MPa – 0.28 MPa (38 psi – 40 psi)
-68 kPa (20 in -Hg min.)
200.1 mm (7.878”)
60.7 mm (2.39")
216.5 mm (8.52")
Approximately 5 kg (11 lb)
Input voltage (system)
24 VDC ±10%
Specifications are dependent on interface module use
Triggers and acknowledgments
See provided documentation
Indoor use only
Altitude below 2000 m (2187.22 yd)
Ambient temperature 5°C – 40°C (41°F –104°F)
Maximum relative humidity 80% for temperatures up to 31°C (88°F) decreasing linearly to 50% relative humidity at 40°C (104°F)
Mains supply fluctuations from 22 – 26 VDC
Transient overvoltages of overvoltage category II
Pollution degree 2
* Depends on tool configuration. Contact applications support for detailed window of operation. ** Maximum pressure is a limit on the Window of Operation. Actual volumes and rates may be restricted to comply with the pressure limits for a given viscosity, tubing diameter, tubing length and tubing height.