InVue® Integrated Flow Controllers, Model 6550
To discuss your specific needs, contact your local Entegris representative.
Don't have an Entegris representative?
Contact UsThank you for requesting a quote. Someone from Entegris will contact you shortly.
Your quote number is {0}.
NT™ Flow Viscosity, Density and Temperature Correction
Use our Flow Viscosity, Density and Temperature Correction tool to calculate a full scale flow correction for media other than DI water at 23°C.
Flow Range: Flow ranges are scaled to zero flow, measurement is from 10-100% of full scale flow range. .
Inlet/Outlet Port Connection: For other options not shown here, please contact Entegris.
Electrical Connector Type: For electrical connector types G01 a 14-pin mating cable is required for installation. See accessories section for more information.
Product specified with a flared tube connection is packaged with two PVDF nuts. For alternative nut materials, or custom configurations and specifications, please contact Entegris.
For help selecting the correct model, view the Materials of Construction and Chemical Compatibility for Sensing and Control Products technical note found under Product Documentation at the bottom of this page.
The InVue IFC Model 6550 combines our differential pressure-based flowmeter and leading-edge control valve technology to create a closed-loop flow controller ideal for:
- High flow applications such as bulk delivery or tool liquid dispense
- Critical dispense applications
- Chemical spiking and blending
- On-demand chemical mixing
Specifications
| Inlet/outlet port connection | Dimensions | ||
| A | B | C | |
| 1" Flaretek tube fitting | 235.6 mm (9.28") | 37.1 mm (1.46") | 277.5 mm (10.93") |
| 1" PrimeLock tube fitting | 239.7 mm (9.44") | 41.1 mm (1.62") | 282.2 mm (11.11") |
| Materials of construction | Wetted parts: | Body: PTFE, PFA | |
| Diaphragm: PTFE | |||
| Sensor interface: CTFE or PFA | |||
| Primary O-ring: Perfrez® 6375 UP | |||
| Nonwetted parts: | Polypropylene, PVDF, Viton®, polyurethane, and PVC (in addition to materials listed above) | ||
| Operating range | 10 –100% of full scale flow | ||
| Flow control accuracy | ±1% of full scale (calibrated using DI water @ 23°C [73°F]) | ||
| Repeatability | ±0.5% of full scale | ||
| Pressure measurement output | 0 – 689 kPa (0 – 100 psig) | ||
| Pressure accuracy | ±1% of full scale | ||
| Operating pressure | 103 – 552 kPa (15 – 80 psig) (60 L/min, 90 L/min) 172 – 552 kPa (25 – 80 psig) (120 L/min) |
||
| Minimum required differential pressure* | ≥15 psi, differential (60 L/min, 90 L/min) ≥25 psi, differential (120 L/min) |
||
| Output signals | Two 4 – 20 mA electrically isolated outputs, one for flow and one for pressure | ||
| Response time | <3 seconds at ≥15 psid (60 L/min, 90 L/min) <3 seconds at ≥25 psid (120 L/min) |
||
| Over-pressure limit | 827 kPa (120 psig) | ||
| Process temperature | 10° – 65°C (50° – 149°F) | ||
| Electrical input | 24 VDC (±10%) at 1.2 amps | ||
| Setpoint input signal | 4 – 20 mA, 0 –10 VDC | ||
| Enclosure | IP54 | ||
| Weight: | 3.2 kg (7 lbs) | ||
| Approvals: | CE | ||
| *Minimum required differential pressure is the minimum inlet to outlet fitting differential pressure required to reach full scale flow and response time specifications. Note: Specifications are subject to change without notice. Please Contact Entegris for the most current information. |
|||
Successfully Opted for software Updates
NT™ Flow Viscosity, Density and Temperature Correction
Use our Flow Viscosity, Density and Temperature Correction tool to calculate a full scale flow correction for media other than DI water at 23°C.
Flow Range: Flow ranges are scaled to zero flow, measurement is from 10-100% of full scale flow range. .
Inlet/Outlet Port Connection: For other options not shown here, please contact Entegris.
Electrical Connector Type: For electrical connector types G01 a 14-pin mating cable is required for installation. See accessories section for more information.
Product specified with a flared tube connection is packaged with two PVDF nuts. For alternative nut materials, or custom configurations and specifications, please contact Entegris.
For help selecting the correct model, view the Materials of Construction and Chemical Compatibility for Sensing and Control Products technical note found under Product Documentation at the bottom of this page.