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Integrated Flow Controllers

Designed for point-of-use blending and dispense of ultrapure liquid chemicals, DI water and slurry.

Designed for point-of-use blending and dispense, Integrated Flow Controllers combine our proven and reliable, differential pressure flow measurement technology and advanced closed-loop process control. Available in low-to-medium, medium and medium-to-high flow ranges.

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The Study of Effectiveness of Key Priming Cycles in IntelliGen® ULV
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Narrow Your Selection
  • Flow Range
  • Industry
  • Process
InVue® Integrated Flow Controllers, Model NT6510
InVue® Integrated Flow Controllers, Model NT6510
InVue® Integrated Flow Controllers, Model NT6510
Integrated flow controller flow range 15 - 1250 mL/min differential pressure based flowmeter and leading-edge control valve technology to create a closed-loop flow controller
Flow Range
  • 0-1250 mL/min
 Industry
  • Semiconductor
  • Data Storage
  • Flat Panel Display
  • LED
 Process
  • Bulk Chemical Delivery
  • CMP
  • Photolithography
  • Wafer Growing
  • Wet Etch and Clean
  • Substrate - IPA
  • Substrate - Polishing
  • Media - Cleaning
  • Media - IPA
  • HDD Assembly - Cleaning
  • Magnetic Head - Photolithography
  • Magnetic Head - Wet Etch and Clean
  • Magnetic Head - CMP
  • HGA/HSA Assembly - Cleaning
  • Lithography
  • Cleaning
  • Substrate - Cleaning
InVue® Integrated Flow Controllers, Model NT6520
InVue® Integrated Flow Controllers, Model NT6520
InVue® Integrated Flow Controllers, Model NT6520
Designed for point-of-use chemical blending and dispense with flow range capability of 2.5 to 40 L/min. Combines our differential pressure based flowmeter and leading-edge control valve technology to create a closed-loop flow controller.
Flow Range
  • 2.5-40 L/min
 Industry
  • Semiconductor
  • Data Storage
  • Flat Panel Display
  • LED
 Process
  • Bulk Chemical Delivery
  • CMP
  • Photolithography
  • Wafer Growing
  • Wet Etch and Clean
  • Magnetic Head - Wet Etch and Clean
  • Magnetic Head - CMP
  • Cleaning
  • Lithography
  • Magnetic Head - Photolithography
  • Media - Cleaning
  • Media - IPA
  • Substrate - IPA
  • Substrate - Polishing
  • Substrate - Cleaning
  • HDD Assembly - Cleaning
  • HGA/HSA Assembly - Cleaning
NT™ Integrated Flow Controllers, Model 6500
NT™ Integrated Flow Controllers, Model 6500
NT™ Integrated Flow Controllers, Model 6500
Using the latest electronic technology and high-purity materials, the NT™ Integrated Flow Controller, Model 6500 provides precision flow control in legacy applications.
Flow Range
  • 0-40 L/min (legacy product)
 Industry
  • Semiconductor
  • Data Storage
  • Flat Panel Display
  • LED
 Process
  • Bulk Chemical Delivery
  • CMP
  • Photolithography
  • Wafer Growing
  • Wet Etch and Clean
  • Cleaning
  • Lithography
14-Pin Mating Cable
14-Pin Mating Cable
14-Pin Mating Cable
Accessory cable used to terminate electrical cables on our InVue® Integrated Flow Controllers, models NT6510 and NT6520
Flow Range
  • N/A
InVue® Integrated Flow Controllers, Model 6550
InVue® Integrated Flow Controllers, Model 6550
InVue® Integrated Flow Controllers, Model 6550
Integrated flow controller with 60, 90, or 120 L/min flow rates are ideal in applications requiring high flow volumes and bulk chemical flow control
Flow Range
  • 0-120 L/min
 Industry
  • Semiconductor
  • Data Storage
  • LED
  • Flat Panel Display
 Process
  • Bulk Chemical Delivery
Related Product Categories
NT™ Proportional Control Valves

Our NT™ Proportional Control Valves are compatible with highly corrosive processes and designed for use in CMP slurry and ultra high-purity applications. With a range of flow factors from 0.16 to 10 Cv, we have a linear control valve to meet your flow control needs.
Photochemical Dispense Pumps

Learn how our two-stage dispense technology with a built-in Impact® 8G filter manifold enables independent filtration and dispense. Available for low-, medium- and high-viscosity fluids. Communication systems enable you to network your pumps for efficient process monitoring.
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