IntelliGen® LV Dispense Systems
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The following graph shows highly repeatable dispense characteristics over a span of 200 dispense cycles. The PGMEA chemistry, used in the test, passed through the Impact® filter at a dispense rate of 0.7 mL /sec and a 3 sigma rating of 0.006 mL. The upper and lower limits were 4.050 and 4.010 mL, with an average flow rate of 4.030 mL.
Reference Materials
CAD
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Applications
Low-viscosity (1-100 cP) point-of-use photochemical dispense
Specifications
The dimensions shown are for all available IntelliGen® LV dispense system fitting configurations.
| Dispense performance: | Volume | 0.01 - 10.0 mL in 0.001 mL increments | |
| Rate | 0.1 - 3.0 mL/sec in 0.001 mL/sec increments | ||
| Repeatability | ≤0.02 mL 3 sigma | ||
| Viscosity range* | 1 - 100 cP or at higher viscosities when dispense pressure does not exceed 29 psi | ||
| Maximum dispense design pressure** | 0.20 MPa (29 psi) | ||
| Recharge performance: | Fill rate, filtration rate, vent rate, purge rate | 0.1 - 3.0 mL/sec in 0.01 mL/sec increments | |
| Vent frequency | Auto-venting or 1-10,000 dispense cycles | ||
| Mechanical: | Wetted surfaces | Modified PTFE, PTFE, Kalrez® | |
| Connection type | Insert style, Super Type Pillar® or Flowell™ 60 series | ||
| Filter | Impact 8G or Impact 2 V2 (OF style) | ||
| Inlet, outlet and vent tubing | OD | 6.35 mm (0.25") or 6.0 mm (0.24") | |
| ID | 3.97 mm (0.15628") or 4.0 mm (0.16") | ||
| Inlet gas type | Regulated N2 | ||
| Operating conditions | Minimium operating pneumatic pressure: 0.26 MPa (38 psi) Maximum operating pneumatic pressure: 0.28 MPa (40 psi) Pneumatic leak pressure: 0.30 MPa (43 psi) | ||
| Vacuum | - 68 kPa (20 in -Hg min.) | ||
| Dimensions: | Height | 200.1 mm (7.878") | |
| Width | 60.7 mm (2.39") | ||
| Depth | 209.17 mm (8.235") | ||
| Weight: | Approx. 5 kg (11 lb) | ||
| Electrical: | Current rating | 1.25A | |
| Input voltage (system) | 24 VDC ±10% | ||
| Serial communication | Specifications are dependent on interface module use | ||
| Parallel communication | Triggers and acknowledgments | ||
| Certifications: | See provided documentation. | ||
| Environment: | Indoor use only | ||
| Altitude below 2000 m (2187.22 yd) | |||
| Ambient temperature 5°C - 40°C (41°F -104°F) | |||
| Maximum relative humidity 80% for temperatures up to 31°C (88°F) decreasing linearly to 50% relative humidity at 40°C (104°F) | |||
| Mains supply fluctuations from 22 - 26 VDC | |||
| Transient overvoltages of overvoltage category II | |||
| Pollution degree 2 | |||
*Depends on tool configuration. Contact applications support for detailed window of operation.
**Maximum pressure is a limit on the Window of Operation. Actual volumes and rates may be restricted to comply with the pressure limits for a given viscosity, tubing diameter, tubing length and tubing height.
Successfully Opted for software Updates
Published Jul 31, 2018
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Part Numbers
| Part Number | Fitting Type | Cable Length | Connector |
|---|---|---|---|
| IGLVPVAP1 | 1/4" Super Type Pillar® | 3.0 m | D-Sub 15 pin |
| IGLVPVAW1 | 1/4" Insert style Flowell™ 60 series | 3.0 m | D-Sub 15 pin |
| IGLVPVBP1 | 1/4" Super Type Pillar® | 1.25 m | RDS01 connector |
| IGLVPVCP1 | 1/4" Super Type Pillar® | 0.80 m | D-Sub 15 pin |
| IGLVPVGP1 | 1/4" Super Type Pillar® | 0.1 m | D-Sub 15 pin, 3 lines |
| IGLVPVHP2 | 6 mm Super Type Pillar® | 1.25 m | D-Sub 15 pin |
| IGLVPVJP2 | 6 mm Super Type Pillar® | 10.0 m | D-Sub 15 pin |
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