VaporSorb™ FAC Chemical Filters
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Offer superior protection for advanced semiconductor manufacturing environments at sub-22 nm nodes and are configurable for any type of air handling unit installation including:
- Make-up air (MUA) applications
- Return air handler (RAH) applications
Specifications
Chemical Capacity*
Entegris expresses filter AMC capacity as the product of challenge concentration and time, the unit is ppb-h (parts per billion-hours; ppb = 10-9 mols per mol of air). With that number, and the desired end-of-life removal efficiency, the user can calculate lifetime in hours by using their measured onsite AMC concentration.
Nominal size | 242412 | 241212 | ||
Targeted air flow | 2000 cfm | 1000 cfm | ||
Targeted face velocity | 2.54 m/s (500 ft/min) | 2.54 m/s (500 ft/min) | ||
Height | 592 mm (23.313") | 287 mm (11.313") | ||
Width | 592 mm (23.313") | 592 mm (23.313") | ||
Depth | 287 mm (11.313") | 287 mm (11.313") | ||
Weight | 14.5 kg (32 lbs) | 9.1 kg (20 lbs) | ||
Pressure drop | 110 Pa @ 2.54 m/s (500 ft/min) | 110 Pa @ 2.54 m/s (500 ft/min) |
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