Facility Filtration


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  • Contaminants
  • Industry
  • Process
Deliver field- and lab-proven performance in advanced manufacturing environments in semiconductor, flat panel, and LED fabs
Contaminants
  • Acids
  • Bases
  • Organics
Industry
  • Semiconductor
  • Data Storage
  • LED
Process
  • CMP
  • Deposition
  • Dry Etch
  • Ion Implant
  • Photolithography
  • Wet Etch and Clean
  • Magnetic Head - Photolithography
  • Magnetic Head - CMP
  • Magnetic Head - Wet Etch and Clean
Facilities filtration solutions that provide complete protection against the full range of airborne molecular contamination at 22 nm and below.
Contaminants
  • Organics
  • Bases
  • Acids
Industry
  • Semiconductor
Process
  • High-flow facilities applications
Data center filtration solutions that provide complete protection against the full range of airborne molecular contamination that can cause electronics corrosion and degradation.
Contaminants
  • Bases
  • Organics
  • Acids
Industry
  • Data Centers
Process
  • Data center filtration
Fire emissions and smoke (FES) filters provide complete protection against the full range of airborne molecular contamination (AMC) caused by fires.
Contaminants
  • Acids
  • Organics
  • Fire Emissions and Smoke
Industry
  • Industrial
  • Semiconductor
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