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VaporSorb™ CMP Chemical Filters

The VaporSorb™ CMP Chemical Air Filters deliver complete protection against the full range of airborne molecular contaminants at 22 nm and below. Protect both process equipment and wafers from the damaging effects of airborne molecular contamination

  • Protects against AMC at 22 nm and below
  • Balanced media blend to target acid contaminants
  • Removes critical acids, bases and organics to reduce contamination risk
 
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