VaporSorb™ CMP Chemical Filters
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- CMP
- Magnetic Head - CMP
Specifications
Materials | |||
Casing: | Clear anodized aluminum | ||
Media: | Application-specific blends of high performance adsorbents | ||
Cover screens: | Clear anodized aluminum and polyester scrim | ||
Gasket: | Closed cell polyethylene | ||
Physical Performance | |||
Parameter | At | Target | |
Air velocity distribution: | 9 points 0.1 m downstream of filter @ 0.5 m/s face velocity | Uniform distribution, variation ~0 | |
Temperature/humidity variation: | 30 – 70% RH | <10% service life degradation | |
18°C – 35°C (64°F – 95°F) | |||
Dust generation: | Particles per m3 | ISO 5-compliant | |
Metal contaminants: | None detected | <1 ng/L air | |
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