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  • Industry
  • Process
VaporSorb™ CMP Chemical air filters deliver complete protection against the full range of airborne molecular contaminants at 22 nm and below.
Contaminants
  • Acids
Industry
  • Semiconductor
  • Data Storage
Process
  • CMP
  • Magnetic Head - CMP
VaporSorb™ ETC Chemical Filters deliver complete protection against the full range of airborne molecular contaminants at 22 nm and lower.
Contaminants
  • Bases
Industry
  • Semiconductor
  • LED
Process
  • Dry Etch
VaporSorb™ PVD Chemical Filters deliver complete protection against the full range of airborne molecular contaminants at 22 nm and lower.
Contaminants
  • Organics
Industry
  • Semiconductor
  • LED
Process
  • Deposition
VaporSorb™ ECD Chemical Filters provide complete protection against the full range of airborne molecular contaminants at 22 nm and below.
Contaminants
  • Organics
Industry
  • Semiconductor
  • LED
Process
  • Deposition
Our Chemical Vapor Deposition (CVD) filtration solutions deliver complete protection against the full range of airborne molecular contaminants at 22 nm and below.
Contaminants
  • Acids
  • Bases
  • Organics
Industry
  • Semiconductor
  • LED
Process
  • Deposition
VaporSorb™ MET Chemical Filters deliver complete protection against the full range of airborne molecular contaminants at 22 nm and below.
Contaminants
  • Acids
  • Bases
  • Organics
Industry
  • Semiconductor
Process
  • Metrology
Our Vaporsorb™ WEC chemical filters deliver complete protection against the full range of airborne molecular contaminants at 22 nm and lower.
Contaminants
  • Acids
Industry
  • Semiconductor
Process
  • Wet Etch & Clean
VaporSorb™ EPI Chemical Filters offer complete protection against the full range of airborne molecular contaminants at 22 nm and lower.
Contaminants
  • Organics
Industry
  • Semiconductor
Process
  • Deposition
VaporSorb™ II Chemical Air Filters provide a full range of protection against Total Molecular Base (TMB) chemicals.
Contaminants
  • Bases
Industry
  • Semiconductor
Process
  • Photolithography
VaporSorb™ II-ABC Lithography Track Chemical Air Filters provide superior protection against acids, amines and condensable organics in Tokyo Electron (TEL) Lithography Tracks.
Contaminants
  • Acids
  • Bases
  • Organics
Industry
  • Semiconductor
Process
  • Photolithography
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