Entegris is a global leader in contamination control, critical materials handling, and advanced process materials for the semiconductor and other high-tech industries. Entegris is ISO-9001 certified and has manufacturing, customer service and/or research facilities in the United States, China, France, Germany, Israel, Japan, Malaysia, Singapore, South Korea and Taiwan.
Entegris is committed to providing customers the best information possible to ensure optimal product performance. Our resource center provides in-depth product and application information through product data sheets, technical papers, SDSs and more. Be sure to visit the resource center regularly to see updates and new additions.
For 50 years, Entegris has been a provider of critical products and materials used in advanced high-technology manufacturing. These products and materials are often used to make the building blocks of many of the world's most complex microelectronic products, such as computers, mobile devices and phones, data storage components, televisions and monitors, and automobiles.
VaporSorb™ II Chemical Air Filters provide a full range of protection against Total Molecular Base (TMB) chemicals. Designed to Tokyo Electron® specifications with the ability to remove airborne molecular ammonia and organic amines to the sub-parts-per-billion range.
Protects against TMB gas phase contaminants
Guaranteed performance (when installed to OEM specs)
Fits all lithography coat-and-develop tracks
Long service life eliminates tool interruptions
Low cost of ownership
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