VaporSorb™ TRK Chemical Air Filters
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Reference Materials
CAD
CAD drawings may be available for this product. Please use the Part Selector to select a part number to see if they are available.
Applications
- Head-Photolithography
- Lithography
Specifications
| Materials | ||
|---|---|---|
| Casing: | Clear anodized aluminum | |
| Media: | Application-specific blends of high performance adsorbents | |
| Cover screens: | Clear anodized aluminum and polyester scrim | |
| Gasket: | Closed cell polyethylene | |
| Physical Performance | ||
| Parameter | At | Target |
| Air velocity distribution: | 9 points 0.1 m downstream of filter @ 0.5 m/s face velocity | Uniform distribution, variation ~0 |
| Temperature/humidity variation: | 30 –70% RH 18°C –35°C (64°F–95°F) | < 10% service life degradation |
| Dust generation: | Particles per m3 | ISO 5-compliant |
| Metal contaminants: | None detected | < 1 ng/L air |
Successfully Opted for software Updates
Published Aug 1, 2018
Brochure
Airborne Molecular Contamination (AMC) Solutions for the Microelectronics Industry
2.1 MB
Part Numbers
| Part Number | Gasket (if used) | Height | Width |
|---|---|---|---|
| ESI006600-03 | No | 400 mm (15.74") | 1120 mm (44.09") |
| ESI006600-06 | No | 460 mm (18.11") | 460 mm (18.11") |
| ESI006600-12 | Yes | 460 mm (18.11") | 620 mm (24.40") |
| ESI006600-13 | Yes | 460 mm (18.11") | 385 mm (15.15") |
| ESI006600-14 | Yes | 460 mm (18.11") | 460 mm (18.11") |
| ESI006600-15 | Yes | 615 mm (24.21") | 310 mm (12.20") |
| ESI006669-01 | No | 270 mm (10.62") | 720 mm (28.34") |
| ESI006669-02 | No | 360 mm (14.17") | 620 mm (24.40") |
| ESI006670-01 | No | 360 mm (14.17") | 200 mm (7.87") |