Entegris is a global leader in contamination control, critical materials handling, and advanced process materials for the semiconductor and other high-tech industries. Entegris is ISO-9001 certified and has manufacturing, customer service and/or research facilities in the United States, China, France, Germany, Israel, Japan, Malaysia, Singapore, South Korea and Taiwan.
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For 50 years, Entegris has been a provider of critical products and materials used in advanced high-technology manufacturing. These products and materials are often used to make the building blocks of many of the world's most complex microelectronic products, such as computers, mobile devices and phones, data storage components, televisions and monitors, and automobiles.
VaporSorb™ CSP-32 Chemical Air Filters offer advanced protection for exposure tool optics and photoresists. Designed for our custom filter housings, CSP-32 filters provide unparalleled protection against unplanned and elevated contamination events like solvent and developer chemical spills.
Asymetric filter design prevents conversion of HDMSO to TMS
Removes acids, bases and condensable organics
Pleated filter design in rigid, deep frame
Low pressure drop enables serial filter layout for multiple protective layers
Interstack sampling ports for easy monitoring
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