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Chambergard™ FV50D XL Gas Diffuser

Rapidly reduce particles and vent times in load lock and transfer chambers and feature an efficient and robust Ni disk membrane.

  • Rated at 1,000,000 cycles and designed to operate at higher inlet pressures
  • Patented, sintered nickel technology in a compact diffuser unit provides superior performance in all applications
  • Removes particles greater than 0.0015 µm from incoming gas, minimizing wafer defects
  • Easily installed/retrofitted into existing tools minimizes downtime
  • Read More Read Less
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